XMOD Technologies Hicum toolkit extraction services

XMOD Technologies: Hicum toolkit & extraction services Bertrand Ardouin Thomas Zimmer Michael Schröter HICUM Workshop, June 6 - 7, Dresden

OUTLINE üXMOD: Presentation üHow to choose a compact model ? üMeasurement, Extraction, Modelling Services and Consulting üHicum “Aperitif toolkit” Simple approach HICUM Workshop, June 6 - 7, Dresden

Who ? TEAM Bertrand ARDOUIN, Ph. D, University Laboratoire de Microélectronique IXL Bordeaux Thomas ZIMMER, Associate Professor, University Bordeaux, Laboratoire de Microélectronique IXL Michael SCHRÖTER, Professor, T. University Dresden, chair for electron devices and integrated circuits HICUM Workshop, June 6 - 7, Dresden

Where ? Laboratoire de Microélectronique IXL not here XMOD is here HICUM Workshop, June 6 - 7, Dresden

What ? A Start-up company in the Bipolar modelling domain : Offering parameter extraction software Provide extraction and modelling services (parameter extraction, on wafer measurements, …) Hicum (SGP and VBIC models also supported) Single transistor and scaling approach Custom models for specific applications (HDL-A) Co-operation and support from : Technical University Dresden University Bordeaux HICUM Workshop, June 6 - 7, Dresden

What ? On wafer measurement capabilities NWA HP 8510 C (HF, CV) HP 4155 B (DC) C-V meter HP 4284 (C-V) T controler -60 °C up to 200 °C Semi-automatic prober Karl Suss PA 200 HICUM Workshop, June 6 - 7, Dresden

What ? The “Hicum Aperitif Toolkit” Single transistor methodology “In House” ICCAP tools for complete parameter extraction HICUM Workshop, June 6 - 7, Dresden

Simplicity: Time requirement = save money Why ? Advanced compact models VBIC Gummel-Poon Mextram Efficiency: ability to model complex technologies HICUM Workshop, June 6 - 7, Dresden Hicum

Simplicity: Time requirement = save money Why ? Advanced compact models VBIC Gummel-Poon Mextram Efficiency: ability to model complex technologies HICUM Workshop, June 6 - 7, Dresden Hicum

Simplicity: Time requirement = save money Why ? Advanced compact models VBIC Gummel-Poon Mextram Efficiency: ability to model complex technologies HICUM Workshop, June 6 - 7, Dresden Hicum

Simplicity: Time requirement = save money Why ? VBIC Gummel-Poon Mextram Efficiency: ability to model complex technologies HICUM Workshop, June 6 - 7, Dresden Hicum

Simplicity: Time requirement = save money Why ? Scalability and Physical meaning not taken into account VBIC Gummel-Poon Single transistor strategy Mextram Efficiency: ability to model complex technologies HICUM Workshop, June 6 - 7, Dresden Hicum

Why ? There’s a need for companies in this domain: Help to accelerate the FIRST use of Hicum and help to establish a wide use Provide complete extraction services for companies having no experience in the bipolar domain (Si. Ge) Provide consulting for modelling very High frequency devices, need of scaling, modelling precision, statistics, temperature, . . . Centralise Bipolar experience HICUM Workshop, June 6 - 7, Dresden

Goals of the “Hicum Aperitif Toolkit” ? Gummel-Poon Switch ü Learn a new model and new tools ü Complex scaling approach ü New test structures on the wafers HICUM Workshop, June 6 - 7, Dresden Hicum

Goals of the “Hicum Aperitif Toolkit” Gummel-Poon Hicum Switch “Hicum Aperitif Toolkit” allows to use the single transistor strategy (SGP like) Simplified approach Decouple Scaling from parameter extraction No specific test structures HICUM Workshop, June 6 - 7, Dresden

Goals of the “Hicum Aperitif Toolkit” allows to: Evaluate Hicum without too much effort A smooth transition from SGP to Hicum Obtain efficient and physically meaningful parameter sets for Hicum (from direct extraction) HICUM Workshop, June 6 - 7, Dresden

Description of the toolkit Instruments ICCAP measurements toolkit Standard Bipolar Measurement Database Probes ICCAP Gummel-Poon, VBIC, MEXTRAM HICUM Workshop, June 6 - 7, Dresden Hicum “Aperitif” Toolkit TRADICA and BIPAX

Description of the toolkit ICCAP HICUM Workshop, June 6 - 7, Dresden « Hicum aperitif Toolkit » New GUI interface

Description of the toolkit Main window Import data Simply select directory Import Define Select mdm file + view header HICUM Workshop, June 6 - 7, Dresden

Description of the toolkit Define things Temperature Comments on technology

Description of the toolkit Extraction steps Status Parameter group Run HICUM Workshop, June 6 - 7, Dresden Edit parameters

Description of the toolkit Export Results Export Directory Utilities Create HTML documentation HICUM Workshop, June 6 - 7, Dresden

Description of the toolkit Get from plots Optimize Tune HICUM Workshop, June 6 - 7, Dresden

Description of the toolkit HICUM Workshop, June 6 - 7, Dresden

Description of the toolkit HICUM Workshop, June 6 - 7, Dresden

Description of the toolkit HICUM Workshop, June 6 - 7, Dresden

Description of the toolkit HICUM Workshop, June 6 - 7, Dresden

Description of the toolkit HICUM Workshop, June 6 - 7, Dresden

Parameter extraction: f. T (Ic) Results b (Vce) Bi. CMOS Si. Ge 0. 35 µm ST Microelectronics f. T = 45 GHz HICUM Workshop, June 6 - 7, Dresden

Parameter extraction: Ic (Vbe), Ib (Vbe) Results Ic (Vce) Bi. CMOS Si. Ge 0. 35 µm ST Microelectronics f. T = 45 GHz HICUM Workshop, June 6 - 7, Dresden

Parameter extraction: Results g 0 = d IC / d. Vce Bi. CMOS Si. Ge 0. 35 µm ST Microelectronics f. T = 45 GHz HICUM Workshop, June 6 - 7, Dresden

Parameter extraction: Results f. T (Ic) Bi. CMOS Si. Ge 0. 25 µm ST Microelectronics f. T = 75 GHz HICUM Workshop, June 6 - 7, Dresden

Parameter extraction: Results Bi. CMOS Si. Ge 0. 25 µm ST Microelectronics f. T = 120 GHz HICUM Workshop, June 6 - 7, Dresden

Conclusion üXMOD provides Software, Consulting and Services for Bipolar Modelling community ü“Hicum Aperitif Toolkit” is ready for evaluation üSimplified approach allows to familiarise with the model and extend its interest üScaling and statistics planed HICUM Workshop, June 6 - 7, Dresden