X EPNM Penza State University FABRICATION OF MAGNETRON TARGETS BY SHOCK COMPRESSION А. Е. Rozen, S. G. Usatyi, D. V. Karakozov, N. А. Lyubomirova 40, Krasnaya Str, Penza, 440026, Russia e-mail: metal@pnzgu. ru
X EPNM Urgency job World earnings of the technologies allowing combining abilities of capacitive and resistive touch displays will double by 2012 and will account for 4, 4 billion US dollars. The given product is manufactured using targets of magnetron type of evaporation. Rather strict requirements are set for the targets: - high chemical purity and structural uniformity throughout the target; - high density for reducing gas content in pores; - high stability in the conditions of temperature changes and considerable temperature differences over the thickness. 2
X EPNM Producing the target one should pay attention to: - the density; - the grain size; - the uniformity; - the target fastening to the base; - the technology of producing the resistive compact. There are two most widely-spread ways of producing the targets: - powder metallurgy; - and melting with the following casting. 3
X EPNM Objective of the work The objective of the work is development of the technology of shock-wave processing of the powder resistive material for the targets of the magnetron type of evaporation. As the standard test material to carry out the research the silicon resistive material powder has been chosen. Its chemical composition: - Cr = 52, 5 … 55, 5 %; - Si = 38, 0 … 43, 0 %; - Co = 4, 5 … 7, 5 %. 4
X EPNM Explosive pressing arrangement 5
X EPNM Explosive compression 1 - electrical detonator; 2 – explosive charge; 3 - piston plate; 4 - conservation container; 5 - press powder; 6 – metal plate , 7 – rings; 8 – target foot; 9 – plate foot; 10 – ground. 6
X EPNM Magnetron targets by shock compression 7
X EPNM UVN 71 -P 3 plant UVN 71 -P 3 p 8
X EPNM Comparative data Target producing technique Casting technique Hot pressing technique Explosive pressing technique Electrophysical features resources, minimal deviation of the heating resistive resistance from the cycle layer, nm nominal, % 103 50 up to 1, 0 104 30 up to 0, 5 9
X EPNM Conclusions - it was shown that traditional technologies of producing articles from resistive materials do not provide achieving the performance criteria built in the nature of the matter; - it was developed the pattern of explosive loading; - it was received materials with high electrophysical characteristics. 10
X EPNM Thank you for attention 40, Krasnaya Str, Penza, 440026, Russia e-mail: metal@pnzgu. ru 11
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