Скачать презентацию WP 4 Dynamic Risk Assessment Control Plan Скачать презентацию WP 4 Dynamic Risk Assessment Control Plan


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WP 4: Dynamic Risk Assessment & Control Plan (Contact: philippe. vialletelle@st. com) Objectives Historical WP 4: Dynamic Risk Assessment & Control Plan (Contact: philippe. [email protected] com) Objectives Historical WP 4 targets the definition of a comprehensive approach to reduce process excursions and to guarantee an optimal use of various control techniques (metrology, sensors, etc) Task 4. 1 Dynamic Risk Modelling and evaluation Starts from WP 3 health factor and correlates with yield WP 3 Risk WP 2 Product Equipment Loading Cost Production Plan Control Tools & Techniques Availability Adjustments & Breaches Efficiency WP 5 Task 4. 2 Target Control Plan computation Balance risk vs. cost of controls (+ define target ctrl plan) WP 6 Control Plan Task 4. 3 Adaptive Control Plan, integrating Factory Dynamics Define “real time” adjustments (i. e. dynamic sampling) Target WP 1 Control Plan Current / Active Current Activities 4. 1 Definition of specifications Integration of equipment health factor, description of outputs to other modules and definition of monitoring procedures for risk measurements 4. 2 Development of α Prototypes Target control plan computation on stand-alone metrology (validate concept) Automatic “wafer at risk” monitoring First prototype being tested on defectivity measurements. 4. 3 Development of a sampling simulator Basic concepts defined, first set of specification published Simulator to be used to validate various sampling & skipping algorithms before their implementation for “live test”. WP 5: Integration in Factory Information & Control System (Contact: giuseppe. [email protected] com) Objectives ü The main scope of this WP is to translate into components the inputs (requirements and specifications) coming from WP 1 -4. User requirement WP 2 WP 3 WP 4 ü This will also includes feed-back loops between the validation phases and the development to refine the prototypes according the actual implementation learning. ü WP 5 follows a 3 -step-approach for each of the envisaged components that looks in principle as follows: 1. In a first step, develops and tests all prototypes; 2. In a second step, the results of the first test will be provided as input for define the final general specifications and characteristics; 3. Finally, validation of the final specifications and characteristics. HS/SW requirement WP 1 Design, Prototype, Test and Validation WP 5 o Task 5. 1: Integration of VM systems o Task 5. 2: Integration of PM related decision systems o Task 5. 3: Integration of automated control plan systems o Task 5. 4: Integration of Sensor Network o Task 5. 5: Factory wide master framework o Task 5. 6: Offline management software Packages European Nanoelectronics Forum, November 17, 18 2009 Noordwijk, The Nederlands