RR seminar 2003 -10 -27 2018 -03 -17

RR seminar 2003 -10 -27 2018 -03 -17 1

THE CLEANROOM • The cleanroom • Rules and routines • Risks with the laboratory work • Alarms and emergency exits • If accidents occur 2018 -03 -17 2

THE CLEANROOM • The cleanroom • Rules and routines • Risks with the laboratory work • Alarms and emergency exits • If accidents occur 2018 -03 -17 3

The cleanroom A separate building, connected to Ångström house 3. Three main areas: 1: The Analysis lab 2: A Project specific part 3: The Process lab 2018 -03 -17 4

The cleanroom The lab area covers the ground floor while the media sections cover three more floors. 2018 -03 -17 5

The cleanroom Area: 2000 m 2 Users from booth university and industry. 2018 -03 -17 6

The cleanroom To access the lab all users need to pass two locked doors. All users need access cards with valid cleanroom access. Between the cleanroom areas and the outside world there is a ”grey zone” made up by the entrance stairways and the visitors corridor. 2018 -03 -17 7

The cleanroom Personnel as well as equipment must be brought in through one two locks, following specific procedures. 2018 -03 -17 8

The cleanroom There are different dressing rules for different lab areas. In the yellow areas cleanroom shoes and coat must be worn. In the process laboratory (blue) cleanroom shoes, coverall and gloves are compulsory. The cleanest parts (green) have further restrictions. 2018 -03 -17 9

The cleanroom • • Controlled particle density humidity temperature vibrations Particle density is measured in # particles >0, 5µm / ft 3 air. Examples of particle sizes: Virus: 0, 005 - 0, 05 µm Tobacco smoke: 0, 01 - 1 µm Color pigments: 0, 1 - 5 µm 2018 -03 -17 10 Red blood cell: ca. 7, 5 µm Human hair: ca. 100 µm

The cleanroom 2018 -03 -17 11

The cleanroom • • 2018 -03 -17 12 Controlled particle density humidity temperature vibrations 100 000 1000 100

The cleanroom • • Controlled particle density humidity temperature vibrations Temperature kept at 21 ± 1°C The air humidity is also controlled. In the cleanest areas the air humidity is kept at 43 ± 5% 2018 -03 -17 13

The cleanroom • • Controlled particle density humidity temperature vibrations BBN-class E (linewidth 0, 5 μm) Vibration speed 10 -3 mm/s Vibration amplitude 1000 Å 2018 -03 -17 14

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AIR CONSUMPTION Wet benches in process flow 3600 liter/sec. Base flow 1750 liter/sec.

AIR CONSUMPTION 30 CM OPENING 5 CM OPENING 34 FUMEHOODS CONSUME 5100 LITER /SEC. 34 FUMEHOODS CONSUME 850 LITER / SEC.

THE CLEANROOM • The cleanroom • Rules and routines • Risks with the laboratory work • Alarms and emergency exits • If accidents occur 2018 -03 -17 20

Rules and routines Basic rules • Avoid all types of particle generating materials, behavior and work to a maximum extent! • All work that can be done outside the cleanroom should be done outside the cleanroom! • Work independent! Do not allow your behavior to be effected if your colleagues are careless ! • Work in a disciplined manner! • All users and visitors must use a name badge at all times when working in the cleanroom. 2018 -03 -17 21 Use your common sense

Rules and routines The largest source of contamination is without doubt the persons working i the laboratory. Examples of human related contaminations are hair, dead skin cells, bacteria, dust particles from clothes etc. 2018 -03 -17 22

Rules and routines Examples of behavior related contamination sources: Bad preparations (Inappropriate clothes, unshaved, too much perfume or make-up) Movements and gestures (Running, clapping hands, whistling, talking, sneezing) Badly planned work 2018 -03 -17 23 (Forced to go in and out of lab rooms extra times etc. )

Rules and routines Examples of human particle generation 100 000 500 000 1 000 2 500 000 2018 -03 -17 24 5 000 - 10 000 [ particles/min >0, 5µm] 10 000 15 000 - 30 000

Rules and routines Examples of human particle generation 2018 -03 -17 25

Rules and routines Examples of basic rules for minimizing the behavior related particle generation: • Do not whistle • Do not touch your face with your hands of gloves • Do not snuff or chew gum • Do not slam the doors • Avoid sudden and hurried moves • Avoid coughing and sneezing 2018 -03 -17 26 Use your common sense

Rules and routines Entering routine - personnel The entering procedure can be split in to three phases: • Preparations • In the grey zone • Changing to cleanroom clothes 2018 -03 -17 27

Rules and routines Entering routines - personnel phase 1 Preparations (outside the cleanroom) – Take off your outdoor clothes, wool sweaters and socks, (use clothes that doesn’t lose dust) and jewelry – Use clean clothes and socks – If you have long hair – make a pony tail – Mind your hygiene – wash your hands smokers) 2018 -03 -17 28 (extra important for

Rules and routines Entering routines - personnel phase 1 Preparations phase 2 In the grey zone (outside the cleanroom) (the visitors corridor) Use shoe protection! 2018 -03 -17 29

Rules and routines Entering routines - personnel phase 1 Preparations phase 2 In the grey zone Phase 3 Changing clothes Unclassed zone (analysis lab) 2018 -03 -17 30 – – Change shoes Hairnet (if necessary) Cleanroom coat Gloves (not compulsory) (outside the cleanroom) (the visitors corridor) (in the cleanroom main lock) Classed zone (process lab) – – Change shoes Use gloves Cleanroom overall Hairnet (if necessary)

Rules and routines Routine for changing clothes when entering the classed zone: 1. Place your outdoor shoes in the shoe shelf 2. Put on cleanroom shoes 3. Put on gloves 4. Put on the overall – do not let your socks or the overall touch the floor 5. Wash your gloves ( At the desk inside the door) No skin must be exposed between arm and glove. 2018 -03 -17 31 No hair must be uncovered.

THE CLEANROOM • The cleanroom • Rules and routines • Risks with the laboratory work • Alarms and emergency exits • If accidents occur 2018 -03 -17 32

Risks and safety Risks with the laboratory work There always a risk for serious accident when you work with chemicals, gases etc. The chemicals course offered by MSL covers topics like rules regarding work with chemicals. Make sure that you always work in a manner that minimizes the risks for personal injuries, fires, chemicals leakage and other accidents. 2018 -03 -17 33

Risks and safety If an accident occur: Rescue person! Call for help! Warn! 00 112 2018 -03 -17 34

Risks and safety Chemicals used in the lab: • • • 2018 -03 -17 35 Dangerous acid, HF Strong acids, HCl, H 3 PO 4, HNO 3, . . . Strong bases, KOH, H 2 O 2, Na. OH, NH 3 Solvents, acetone Photoresist

Risks and safety Security rules for chemicals: – Chemicals can only be used in a ventilated area. – HF can only to be used in rooms 3 R 48, 3 R 51, 3 R 74 and 3 R 79. – In lab work at wet chemical benches always use face protection instead of protective glasses. – Use protective glowes. – Always consider the possible risk before starting a new experiment. 2018 -03 -17 36 – Directly clean up chemical spill so no one accidently get contaminated.

Risks and safety Dangerous gases: BCl 3, Si. H 4, SF 6. . . Are used in deposition processes and dry etching. If a gas leak occur an evacuation alarm goes of. 2018 -03 -17 37

THE CLEANROOM • The cleanroom • Rules and routines • Risks with the laboratory work • Alarms and emergency exits • If accidents occur 2018 -03 -17 38

Alarms and emergency exits Siren + red flashing light = Evacuation alarm Evacuate immediately! Close the entrance door! 2018 -03 -17 39

Alarms and emergency exits Bell + red flashing light = Fire alarm • • • 2018 -03 -17 40 Rescue Put out the fire Warn Evacuate Close the entrance door

Alarms and emergency exits Blue flashing light = operational alarm Only concernes MSL and Akademiska Hus personnel (e. g. central cooling water and vacuum systems) 2018 -03 -17 41

Alarms and emergency exits Localice: • Closest emergency exit • Closest HF-antidote gel • Emergency telephones • Fire extinguishers • Emergency alarm buttons 2018 -03 -17 42

Alarms and emergency exits Emergency exits: 2018 -03 -17 43

Alarms and emergency exits Telephones: 2018 -03 -17 44

Alarms and emergency exits Evacuation alarm Emergency alarm buttons: 2018 -03 -17 45 Fire alarm

Alarms and emergency exits Routines at evacuation alarm Evacuate through the closest emergency exit. There is no time to change clothes or shoes before evacuation. The assembly point after a evacuation is outside the cleanroom entrance (house 1 floor 1). Report all relevant information to MSL personnel (for example if you left an acid in a heated bath). When the lab opens again; you are not allowed to bring the lab clothes and shoes back down. Leave all contaminated lab clothes by the entrance on floor 1. 2018 -03 -17 46

THE CLEANROOM • The cleanroom • Rules and routines • Risks with the laboratory work • Alarms and emergency exits • If accidents occur 2018 -03 -17 48

If accidents occur Examples of accidents that can occur: • Accidents with chemicals • Accidents with gases • Fire accidents • Electric accidents Emergency alarm number from the lab: SOS: 00 112 Akademiska hus emergency number: 00 (018) 68 32 04 2018 -03 -17 49 For other important telephone numbers (the poison information central etc. ) see telephone lists in the lab.

If accidents occur Where is the closest: • Emergency stop button / Machine power off- button • Alarm buttons • Telephone • Fire extinguisher • Closest emergency exit • HF antidote gel • Emergency shower and eye shower 2018 -03 -17 50 If an accident occurs, personal safety always comes first!

The cleanroom Summary: Always work in a manner that minimize the risks for accidents! If an accident occurs, personal safety always comes first! Always work in a cleanroom conscious manner! MSL and the laboratory is a resource for your work. 2018 -03 -17 51

Welcome ! 2018 -03 -17 52 http: //msl. angstrom. uu. se