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Professor Chuan Seng Tan (陈全胜) Nanyang Assistant Professor School of Electrical and Electronic Engineering Professor Chuan Seng Tan (陈全胜) Nanyang Assistant Professor School of Electrical and Electronic Engineering Nanyang Technological University 2008 IWNE 1

Professor Chuan Seng Tan ACADEMIC QUALIFICATIONS Ph. D. in Electrical Engineering and Computer Science, Professor Chuan Seng Tan ACADEMIC QUALIFICATIONS Ph. D. in Electrical Engineering and Computer Science, Massachusetts Institute of Technology, USA (2006) M. Eng. in Advanced Materials, Singapore. MIT Alliance, National University of Singapore, Singapore (2001) B. Eng (Hons) in Electrical Engineering, University of Malaya, Malaysia (1999) 2008 IWNE 2

Professor Chuan Seng Tan 2008 IWNE 3 Professor Chuan Seng Tan 2008 IWNE 3

Professor Chuan Seng Tan RESEARCH INTERESTS My research interest covers the larger area semiconductor Professor Chuan Seng Tan RESEARCH INTERESTS My research interest covers the larger area semiconductor materials, structures, devices, and architecture. I am currently actively forming a group to take three-dimensional integrated circuits (3 -D ICs) research to new heights. Briefly, I am looking at: 3 -D interconnects (Block/Core level stacking) - This project explores enabling technology and process to enable vertical stacking of integrated circuits. This is for applications in high density stand-alone memory, embedded memory on logic, and multi-core. This entails chip-to-wafer and wafer-towafer bonding of Cu/Low-K hybrid at temperature < 200 C. This project also covers formation of through layer via with a targeted density > 10 e 6 cm-2; 2008 IWNE 4

Professor Chuan Seng Tan 2008 IWNE 5 Professor Chuan Seng Tan 2008 IWNE 5

Professor Chuan Seng Tan Group-IV Heteroepitaxy and Heterostructure - I am particularly interested in Professor Chuan Seng Tan Group-IV Heteroepitaxy and Heterostructure - I am particularly interested in direct buffer-less Ge growth on Si substrate for applications in CMOS, photonics, and solar cells (who can say no to SCs these days? ). The epitaxy is performed in an Rapid Thermal Chemical Vapor Depostion (RTCVD) reactor from ASM (if you talk to ASM guys, they dislike the terms RTCVD, they prefer to call their tool "reduced pressure epitaxy"). I am also investigating the feasibility of wafer bonding for similar applications. I undertake the above research in the Microfabrication Laboratory (MFL). Our group is funded generously by these agencies. 2008 IWNE 6

Professor Chuan Seng Tan 2008 IWNE 7 Professor Chuan Seng Tan 2008 IWNE 7

Professor Chuan Seng Tan AWARDS AND SCHOLARSHIPS Nanyang Assistant Professorship - Nanyang Technological University, Professor Chuan Seng Tan AWARDS AND SCHOLARSHIPS Nanyang Assistant Professorship - Nanyang Technological University, Singapore (2008 -2011) Lee Kuan Yew Postdoctoral Fellowship – Lee Kuan Yew Endowment Fund, Singapore (2006 -2008) Applied Materials Graduate Fellowship - Applied Materials, USA (20032005) Research Assistantship – Massachusetts Institute of Technology, USA (2001 -2006) Research Scholarship – Singapore-MIT Alliance, Singapore (1999 -2001) Book Prize – Department of Electrical Engineering, University of Malaya (1999) Dean List – Faculty of Engineering, University of Malaya (1997, 1998, 1999) The Lion-ASM Undergraduate Scholarship – The Lion Group, Malaysia (1996 -1999) Physics Prize – Malaysian Institute of Physics, Malaysia (1996) 2008 IWNE 8

Professor Chuan Seng Tan Working Experience Nanyang Technological University Singapore (08/2008 -Present) Assistant Professor Professor Chuan Seng Tan Working Experience Nanyang Technological University Singapore (08/2008 -Present) Assistant Professor - Supported by the Nanyang Assistant Professorship. Major research activities cover new integration concepts of group-IV based microelectronics. Activity in solar cells will also be initiated. Besides research, I also teach at undergraduate and graduate levels in analog electronics and advanced silicon processing. 2008 IWNE 9

Professor Chuan Seng Tan Nanyang Technological University Singapore (09/2006 -07/2008) Research Fellow – Supported Professor Chuan Seng Tan Nanyang Technological University Singapore (09/2006 -07/2008) Research Fellow – Supported by the prestigious Lee Kuan Yew Postdoctoral Fellowship that includes stipend and research grant. Research on new concepts of semiconductor process integration such as three-dimensional integrated circuits (3 -D ICs). 2008 IWNE 10

Professor Chuan Seng Tan Intel Corporation, Hillsboro, OR (0608/2003) Summer Intern - Investigated interconnect Professor Chuan Seng Tan Intel Corporation, Hillsboro, OR (0608/2003) Summer Intern - Investigated interconnect signal integrity at high frequencies, both measurement and modeling. 2008 IWNE 11

Professor Chuan Seng Tan Microsystems Technology Laboratories, MIT, Cambridge, MA (09/2001 – 03/2006) Research Professor Chuan Seng Tan Microsystems Technology Laboratories, MIT, Cambridge, MA (09/2001 – 03/2006) Research Assistant – Developed fabrication technology for 3 -D ICs using low temperature wafer bonding and thin films handling/transfer. 2008 IWNE 12

Professor Chuan Seng Tan Institute of Microelectronics Singapore (03 -08/2001) Research Engineer – Responsible Professor Chuan Seng Tan Institute of Microelectronics Singapore (03 -08/2001) Research Engineer – Responsible for process integration of strained-Si/relaxed. Si. Ge heterostructures. 2008 IWNE 13