POLYGENERATION OF ELECTRICITY HEAT and ULTRA PURE WATER

POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY Chuanfeng Liu Supervisors: Andrew Martin EGI KTH Aapo Sääsk Xzero AB Henrik Dolfe Xzero AB Heat and Power Technology, Stockholm, Sweden 1

Content 1. Objectives of thesis 2. Current UPW system in semiconductor industry 3. Principle of air gap membrane distillation 4. Xzero test facility of Air Gap Membrane Distillation 5. Integrated MD in cogeneration cycle 6. Conclusion Heat and Power Technology, Stockholm, Sweden 2

Objectives • Integrate MD technology into traditional heat and power cogeneration cycle to produce UPW for semiconductor industry • Theoretical study of membrane distillation • Experimental study of air gap membrane distillation • Economic analysis 3

UPW Consumption in Semiconductor Industry • 50% of total UPW market worldwide. • More than 6000 liters UPW for one eight-inch wafer • 1. 4 -4. 8 million liters UPW per day • The cost of a UPW system in a fab is more than $10 million. Heat and Power Technology, Stockholm, Sweden 4

Present UPW Production System • Reverse osmosis (RO) and Electro-deionization (EDI) • 10 -20 KWH per cubic meter UPW • 2 -3 MW-- 6% of total fab energy consumption Heat and Power Technology, Stockholm, Sweden 5

Make-up Section Raw Water Tank Cartridge Filter Multi Media Filter UV System Primary Mixed Bed Exchange To Polishing Loop Section Carbon Filter Degas Heat Exchanger Break Tank with Nitrogen Blanket Cartridge Filter Reverse Osmosis and EDI Reject 6

From Make up section UPW Water Tank With nitrogen blanket UPW Polishing Loop Section TOC UV Heat Exchanger Ultra Filter Cartridge Filter Polishing Mixed Bed Ion Exchange UPW return line Fab Tool Use Germicidal UV Drains & Rinse 7

Principle of Membrane Distillation Cold side Hot Side Membrane 8

Advantages of MD • 100% (theoretical) rejection of non-volatile matters • lower operating temperatures • lower operating pressure • reduced chemical interaction • reduced vapor spaces compared distillation processes Heat and Power Technology, Stockholm, Sweden 9

Flow Diagram Of Xzero Test Facility 10

Computer Simulation of Membrane Distillation Module emplyed in Aspen Utilites 11

Integrated Cogeneration of MD in the Semiconductor Industry • The power requirement of one typical semiconductor fabrication plant is equal to what 7500 single-family homes consume. • The average power consumption for the fab is 2. 18 KW/m 2, and the average cooling load is 1. 53 KW/m 2. 12

Combined Heat Recovery Chiller With MD Units Waste Heat From Fab 13

Combined MD With Waste Heat From Fab • • Total 35 -40 MW Air conditioner system 4 -5 MW Condenser side 12 MW 20, 000 l/hour possible with readily available waste heat sources • About 1/3 of fab UPW requirement 14

Integrated MD With Power Production • 36 Mwei (fab electricity demand covered ) • 48, 000 L/hr (2/3 UPW demand) 15

Conclusion • Polygeneration is promising in semiconductor industry. • With CHP and waste heat utilization , up to 65 m 3/hr UPW possible for a fab with 5000 wafers production per week. • Capital cost is around $3 per cubic meter UPW. 16