North America Information Control Committee Liaison Report

North America Information & Control Committee Liaison Report December 2011 NA I&C Report - December 2011

Outline • • Leadership Organization Chart Meeting Information Ballot Results Upcoming Ballots Task Force Reports Upcoming Meeting Schedule NA I&C Report - December 2011

Task Force and Leadership Changes • Energy Saving Equipment Communication TF – New task force – Thomas Huang and Gino Crispieri (ISMI) appointed as TF leaders • Data Quality TF – Task force disbanded • Diagnostic Data Acquisition (DDA) TF – Harvey Wohlend stepped down as TF co-leader – Gino Crispieri (ISMI) appointed as TF co-leader – Brian Rubow (Cimetrix) remains as TF co-leader NA I&C Report - December 2011

Leadership • Committee Co-chairs – David Bricker / Applied Materials – Jack Ghiselli / Ghiselli Consulting – Lance Rist / Rist. Tex • Technical Architect – Gino Crispieri / ISMI NA I&C Report - December 2011

Current Committee Structure Information & Control Committee AMHS IBSEM TF Sensor Bus TF Diagnostic Data Acquisition (DDA) TF Process Control Systems (PCS) Architecture TF ! New Energy Saving Equipment Communication TF GEM 300 TF NA I&C Report - December 2011 Sort Map TF

Meeting Information • Last meeting – October 26 for NA Fall 2011 Meetings San Jose, California • Next meeting – April 4 for NA Spring 2012 Meetings San Jose, California NA I&C Report - December 2011

Document Review Summary [1/4] Cycles 5 & 6 * Cycle 5 * Doc # Description TC Action 5102 A Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges to SEMI E 54 -0710, Sensor/Actuator Network Standard Note: Copyrighted material identified as technically justified. Copyright release will be requested. Superclean 5179 A (1 LI) Revision to SEMI E 90. 1 -0706, Provisional Specification for SECS-II Protocol Substrate Tracking 1: Passed as balloted NA I&C Report - December 2011

Document Review Summary [2/4] Cycles 5 & 6 * Cycle 6 * Doc # Description TC Action 4828 (1 LI) Revision to SEMI E 133 -1110, Specification for Automated Process Control Systems Interface. Line item changes to E 133 to provide a virtual metrology capability 1: Passed as balloted 5002 A New Standard: Specification for EDA Common Metadata Failed, reballot 5181 Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Communications for CC-Link IE Field Network to SEMI E 54 -0710, Sensor/Actuator Network Standard Note: Use of CC-Link IE was assessed as potentially material and technically justified. This is similar to other E 54 subordinate standards. LOA will be requested from IP holder. Superclean NA I&C Report - December 2011

Document Review Summary [3/4] Cycles 5 & 6 * Cycle 6 * Doc # Description TC Action 5273 (8 LIs) Revisions to: • SEMI E 40 -0709, Standard for Processing Management • SEMI E 40. 1 -1106, SECS-II Support for Processing Management Standard • SEMI E 87 -0709, Specification for Carrier Management (CMS) • SEMI E 90 -0707, Specification for Substrate Tracking • SEMI E 94 -0309, Specification for Control Job Management, • SEMI E 94. 1 -1107, Specification for SECS-II Protocol for Control Job Management (CJM) To remove References to Inactive Standards and Defects in the GEM 300 Standards 1: Superclean 2: Superclean 3: Superclean 4: Superclean 5: Superclean 6: Superclean 7: Superclean 8: Superclean NA I&C Report - December 2011

Document Review Summary [4/4] Cycles 5 & 6 * Cycle 6 * Doc # Description TC Action 5316 Reapproval for SEMI E 4 -0699 (Reapproved 0307), SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) Passed as balloted 5317 Reapproval for SEMI E 95 -1101 (Reapproved 0307), Specification for Human Interface for Semiconductor Manufacturing Equipment Note: E 95 allowed by NA I&C to go into Inactive status Failed, discontinued 5318 Reapprovals for SEMI E 116 -0707 E, Specification for Equipment Performance Tracking and SEMI E 116. 1 -0707, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT) Failed, discontinued NA I&C Report - December 2011

Technical Ballots to be reviewed at NA Standards Spring 2012 Meetings * Voting Period – Cycle 1 or 2 * Document # Document Title TF / SC 5002 B New Standard: Specification for EDA Common Metadata DDA TF 5177 A Revision to SEMI E 145, Classification for Measurement Unit Symbols in XML DDA TF New SEMI E 54 Subordinate Standard: Specification for Sensor/Actuator Network Specific Device Model for Generic Equipment add-on Sensor (ADDON) Sensor Bus TF 5274 NA I&C Report - December 2011

Task Force Updates • Energy Saving Equipment Communication TF – New task force – Charter • Develop and propose standards that specify communications between the factory system and production equipment to move the equipment between power saving modes as defined in S 23. – Scope • This TF will focus on communication protocol and message content for the purpose of reducing energy consumption on process equipment and supporting subsystems. . • The TF will collaborate with the EHS Committee to avoid conflict with definitions in S 23 NA I&C Report - December 2011

Task Force Updates [continued] • Data Quality TF – Task force disbanded • Diagnostic Data Acquisition (DDA) TF – TF leadership changes • Harvey Wohlwend stepped down as co-leader • Gino Crispieri appointed as new co-leader – New Standard: Specification for EDA Common Metadata (#5002 B) submitted for C 1 or C 2 -12 NA I&C Report - December 2011

Task Force Updates [continued] • GEM 300 TF – No new ballots or SNARFs originating from NA • Process Control Systems (PCS) TF – E 133. 1 revision (#4507 A Info) for fault detection enhancements to be issued as an informational ballot in conjunction with C 2 -12 NA I&C Report - December 2011

Task Force Updates [continued] • Sort Map TF – E 142. x revisions (#5104) to be balloted for Cycle 4, 2012 • Sensor Bus TF – New E 54 subordinate standard for Generic Equipment add -on Sensor (ADDON) [#5274] to be balloted for C 1 or C 2 -12 NA I&C Report - December 2011

Other Discussions • Withdrawal of SNARF # 5319 (E 118 and E 118. 1 reapproval) – NA I&C approved the withdrawal of SNARF # 5319 since E 118 and E 118. 1 are the responsibility of the Japan I&C committee. Japan I&C agreed to perform the appropriate 5 -Year maintenance on E 118 and E 118. 1 • Withdrawal of SNARF # 5318 (E 116 and E 116. 1 reapproval) – NA I&C approved the withdrawal of SNARF # 5318 since Korea I&C plans to update E 116 NA I&C Report - December 2011

NA I&CC Spring 2012 Meeting Schedule [DRAFT] • Monday, April 2 – – I&C Leadership (11: 30 AM to 1: 00 PM) PCS (1: 00 PM to 3: 00 PM) GEM 300 (1: 00 PM to 5: 00 PM) I&C GCS (5: 00 PM to 6: 00 PM) • Tuesday, April 3 – – DDA (8: 00 AM to 3: 00 PM) Sensor Bus (1: 00 PM to 3: 00 PM) Sort Map (3: 00 PM to 5: 00 PM) Energy Saving Equip Comm (3: 00 PM to 6: 00 PM) • Wednesday, April 4 – I&C Committee (8: 00 AM to 4: 30 PM) NA I&C Report - December 2011 SEMI Headquarters San Jose, CA

NA Standards Spring 2012 Meetings • April 2 -5 • SEMI Headquarters in San Jose, California • Inviting local companies willing and able to host some of the meetings to maintain one-week format • Final schedule to be announced soon NA I&C Report - December 2011

NA Standards Spring 2012 Meetings April 2 -5 Sunday 1 Monday 2 Tuesday 3 Wednesday 4 Thursday 5 Friday 6 Saturday 7 EH&S NARSC Facilities & Gases Liquid Chemicals Information & Control MEMS/NEMS HB-LED Schedule -at-a-glance Metrics PV Materials Physical Interfaces & Carriers Silicon Wafer ATE 3 DS-IC NA I&C Report - December 2011 Traceability

NA Standards Staff Changes Paul Trio Sr. Manager, NA Standards Operations Kevin Nguyen Manager, NA Standards Committees Provisional: Contact Paul Trio (ptrio@semi. org) or Kevin Nguyen (knguyen@semi. org) Operations Committees: NARSC / I&C / ATE / MEMS / Microlithography, HB-LED / 3 DS-IC Meetings & Events Planning General Information STEPS/Workshops and Sponsorships Committees: Facilities / Gases / PV Automation / PV Materials / Silicon Wafer / Traceability Standards Website Committees: Compounds Semiconductor Materials / EHS / FPD / Liquid Chemicals / Metrics / PIC Hiring of new NA Standards staff has been completed. Official announcement by the end of the month. NA I&C Report - December 2011

Thank You! For more information or participate in any NA I&C activities, please contact Paul Trio at SEMI (ptrio@semi. org) NA I&C Report - December 2011