Multidisciplinary Engineering Senior Design 06421 Automated Plasma Generator

Multidisciplinary Engineering Senior Design 06421 Automated Plasma Generator Test System Preliminary Design Review 11/11/05 Project Sponsor: MKS, ENI Incorporated Team Members: John Dullea Christine Kuss Megan Suflita Team Mentor: Dr. Ferat Sahin Acknowledgements: Dr. Paul Steibitz, Advisor Kate Gleason College of Engineering Rochester Institute of Technology

Project Background n n n Narrow band HF RF amplifier Parallel devices with controller Subcomponents of 3700 Watt amplifier

Current Situation n n Tedious to test Time consuming Resource consuming Interpolation issues Result analysis is time consuming

Software Capabilities n Lab. VIEW code n n n Collect necessary data Perform calculations Generate graphs Fully automated Required tests

Needs Assessment n Customer’s Needs n n n Automated in Lab. VIEW Graphical User Interface will be provided Ability to vary input parameters Ability to perform safety checks and take measurements Potential for destructive testing Our Needs n n n Access to MKS facility, equipment, and technical support Defined work area at MKS Results of past tests for comparison

Concept Development n Option 1

Concept Development n Option 2

Project Schedule

Key Requirements & Critical Parameters n n n Repeatable Data Safety Checks Fully Automated

Overall System Diagram/Block Diagram n Software flow of overall Lab. VIEW program. n n Contains 4 nested loops Varies all necessary input parameters n n Frequency Impedance Voltage Amplitude

Analysis & Synthesis of Design n Project based upon generic platform n n Easily adaptable for future considerations Easily interchangeable with similar units Customer specifications met Integration of existing code

BOM & Costs n n All equipment provided by MKS Equipment list n n n n Tektronix Digital Scope Bird Power Meter Bird Power Sensor Agilent Power Meter Agilent Power Sensor ENI Load Simulator & RS 232 Cable ENI Matchwork Controller ENI Fiber Optic Converter Agilent Spectrum Analyzer Dell PC Agilent Signal Generator Keithey Scanning Card 4 RF Cables, DC Power Cable, & 6 GPIB Cables Power Supply

Anticipated Design Challenges/Risk n n n Difficulty integrating software blocks Creating user-friendly interface that is easily interpreted UUT safety and control systems Stability of amplifier signal Debugging of code

SD II Project Plan n n Automated Tests Correlation Study Corrective Actions MKS onsite verifications

Deliverables n n n Lab. VIEW code User manual On site training

Questions

Smith Chart http: //www. web-ee. com/primers/files/Smith. Charts/smith_charts. htm

Input Parameters

Signal Generator Frequency Flow

Communications with Load Simulator

Power Supply Handling

Signal Generator Amplitude Handling

Cost – Benefit Analysis n Assumptions n n n n For manual testing a technician requires 3 days for completion Technician gets paid $15/hour. Automated program can complete task in 24 hours with 1 hour set up. ($15)*(8 hrs/day)*(3 days) = $360 ($15)*(1 hr) = $15 A cost difference of $345 per test 3 tests * $360 = $1080 3 tests can be completed with the automatic test system in the same time that 1 test can be completed manually