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Monday 30. 05 10: 00 – 13: 00 Conference hall № 1 (room 314, Monday 30. 05 10: 00 – 13: 00 Conference hall № 1 (room 314, floor 3) button 3 in the lift button 11 in the lift School for Young Scientists "Modern methods of electron and scanning probe microscopy in studies of nanostructures and nanomaterials”. Equipment installation 12. 00 – 12. 20 Polyakov V. V. ("NT-MDT"). “Modern methods of surface studies using atomic force microscopy”. 14. 30 – 14. 55 Korenev P. A. (”SERNIA”). "The use of digital optical microscopy for 3 d modeling of samples with the developed surface”. Round Table 15. 00 -18 -00 1. "Lithographic production" (Avi Aradjuan, Israel) 2. Prospects of fine focused e-beam application for IC development and low volume manufacturing. V. V. Kazmiruk, I. G. Kurganov, A. A. Podkopaev, T. N. Savitskaya. (IMT RAS). Business area Meeting of Israel companies Small conference hall (room 413, floor 4) button 4 in the lift Demonstration Hall Open area 19: 00 – 21: 00 4 th Scientific School on Electron Microscopy 10. 00 – 11. 30 Conference hall № 2 (floor 11) 14: 30 – 19: 00 representatives with potential partners in Zelenograd Master Class "Atomic Force Microscopy" ("NT-MDT") "Digital 3 D optical microscopy“ (”SERNIA”) Welcome party

Tuesday 31. 05 10: 00 – 11: 30 Conference hall № 1 (room 314, Tuesday 31. 05 10: 00 – 11: 30 Conference hall № 1 (room 314, floor 3) 11: 30 – 12: 45 14: 30 – 18: 00 Opening of the International Forum Oral presentations SEM– 2016 “Technounity - SEM 2016" button 3 in the lift 18: 00 – 19: 30 – 20: 00 17. 40 – 18. 10 Urubkov I. V. , specialist scientific and analytical equipment. ("Tokyo Boeki (RUS)). " New models of electron microscopes JEOL» 18. 10 – 19. 00 Dr. Meiken Falke (“Bruker”). “Element distribution analysis from the mm scale to single atoms; possibilities with energy dispersive X-ray spectroscopy in SEM and STEM. ” New methods, equipment and applications 11. 30 – 12. 00 Martyn Green, global sales manager of Mantis. Sigma holding, Ph. D. (MANTIS-SIGMA). New real time XPS chemical analysis of reduction of Titanium Oxide and advances in Low Temperature STM. 12. 05 -12. 35 Novotný Karel (TESCAN ORSAY HOLDING). Analysis of advanced microelectronic devices by means of electron microscopy. Conference hall № 2 (floor 11) button 11 in the lift 14. 30 – 14. 45 Milovzorov N. G. (“TESCAN”). Nanospace - SEM with ionic column, compatible with all installations for molecular beam epitaxy. 14. 50 – 15. 05 Trusov M. A. , head of Raman / AFM ( “Nytek Instruments”). Raman / AFM spectroscopy of carbon structures on the nanoscale. 15. 05 – 15. 30 Trusov M. A. , head of Raman / AFM ( “Nytek Instruments”). Systems for cathodoluminescence from HORIBA Scientific: a description of the advantages and application examples for the study of semiconductors and nanomaterials. 15. 30 – 16. 00 Bykov V. A. , president of NT-MDT companies New possibilities of scanning probe microscopy and spectroscopy 16. 00 – 18. 00 Round table The use of metrology

Среда Wednesday 01. 06 10: 00 – 13: 00 Conference hall № 1 (room Среда Wednesday 01. 06 10: 00 – 13: 00 Conference hall № 1 (room 314, floor 3) button 3 in the lift 14: 00 – 18: 00 – 19: 30 17. 45– 18. 10 Hans Dijkstra, ведущий специалист по микроанализу Thermo Scientific (Thermo Scientific). "The Analysis of Mo 5 Si. B 2 in the SEM using EDS and WDS" Oral presentations SEM– 2016 18. 15– 18. 35 Neudachina V. S. , head of "Analysis of surfaces and nanostructures" (INTERTECH Corp. ). "Photothermal excitation of the cantilever as a revolutionary approach to obtainn AFM images of the highest resolution. " 18. 40– 19. 00 Lukashova M. V. (“TESCAN”). “Experience in the use of ionic column dualbeam scanning electron microscope for precision-EBSD sample preparation”. Presentations of companies 11. 00– 11. 25 Milovzorov N. G. (“TESCAN”). "Scanning electron microscopes TESCAN» Conference hall № 2 (floor 11) button 11 in the lift 11. 30– 11. 50 Kozlov V. V. , head of the Moscow office of the Oxford Instruments Overseas Marketing Ltd. "Systems of electron probe microanalysis of the Oxford Instruments company“. 11. 50– 12. 15 Kozlov V. V. , head of the Moscow office of the Oxford Instruments Overseas Marketing Ltd. "Application of the Kikuchi diffraction for crystal structure diagnostics of rare and new minerals. " 12. 20– 12. 45 Khanin V. A. (“Melytec”). "Phenom XL - a novelty in the desktop SEM FEI Helios Plasma FIB for microelectronics“. 14. 00– 14. 25 Kapchenko I. V. , head of ERCATA Gmb. GH. Materials for Advanced Metallization, Challenges, Tools and Technoogies. 14. 35 Round Table “Presentation of the product on the international market" (JS-Capital, Israel) Application of the cathoderay microscopy equipment 19: 30 – 20: 00

Thursday 02. 06 10: 00 – 13: 00 Conference hall № 1 (room 314, Thursday 02. 06 10: 00 – 13: 00 Conference hall № 1 (room 314, floor 3) 14: 30 – 18: 10 Oral presentations SEM– 2016 Friday 03. 06 19: 00 + 10: 00 – 14: 00 Oral presentations SEM– 2016 button 3 in the lift New methods, equipment and applications Conference hall № 2 (floor 11) button 11 in the lift 10. 00 – 10. 20 Shelaev A. V. (NT-MDT). Near field IR-microscopy and spectroscopy with nanometer resolution. 10. 20 – 10. 40 Gelever V. D. (MSTU MIREA). Low voltage hybrid nanoscope. 10. 40 – 11. 00 Starkov V. V. (IMT RAS). Technological aspects of achievement, properties and application of porous Silicon. 11. 00 – 11. 30 Fedik I. V. (CAMECA). Atomic probe tomography and secondary ions mass spectrometry in investigation of nanoscaled systems. 10. 00 -11. 30 Round table Small conference hall (room 413, floor 4) button 4 in the lift Demonstration 14. 00 -18. 10 Oral presentations at the biological section (11 section) Discussion of joint projects in biomedicine and other areas 11. 30 -13. 00 Round table Discussion of joint projects in microelectronics and ECB 18. 10 Roundtable - biological section (11 section) Master Class "Atomic Force "Digital 3 D optical Closing of the International Forum “Technounity - SEM 2016"