MEMS 2002 Conference Report Daryl Oshatz and Mark

MEMS 2002 Conference Report Daryl Oshatz and Mark Scheeff more information at: www-eng. lbl. gov/~dw/if/ideas/mems 2/15/2002 MEMS 2002 conference report Oshatz and Scheeff

Working definition of MEMS (Micro-Electro-Mechanical Systems) • Integrated systems of sensing, actuation and computation • Usually use a batch fabrication, lithographic process • Usually based on a silicon wafer (LIGA is one exception) • Remove material from wafer OR • Build a structure on top of that wafer • Milli scale, not nano-scale • Can generally still use bulk properties of material 2/15/2002 MEMS 2002 conference report Oshatz and Scheeff

Conference Overview • 500 ish attendees, mostly academic • 3 days in Las Vegas • New field, reasonably approachable people • Single track: • Papers in the morning • Posters in the afternoon • The Food was lousy 2/15/2002 MEMS 2002 conference report Oshatz and Scheeff

Conference Topics • biomedical mems • fluidic components and microsystems, • biomedical/fluidic Bio. MEMS • power mems • acoustics and sensors • technology/material/packaging ·optical mems • actuators • RF/wireless • micro chemical analysis systems 2/15/2002 MEMS 2002 conference report Oshatz and Scheeff

What we Saw, 10, 000 ft view • We got used to saying “Wow” • If you can think of it, its probably been done – (but maybe as an isolated piece) – (but maybe poorly, or in an expensive fashion) – (and probably not driven by a specific app) • Significant maturation in last 3 -5 years 2/15/2002 MEMS 2002 conference report Oshatz and Scheeff

Where are MEMS coming from? • Universities making cool devices • Companies bring talent in house for specific product needs • Companies will make something for you – Memscap, Corning, Applied MEMS etc. 2/15/2002 MEMS 2002 conference report Oshatz and Scheeff

A few devices from the lab Micro-pumps, pneumatic single use power supplies, beam steering units, wireless communication MEMS, wireless powered mems, fluidic mixer, reaction chambers, hinge mechanisms, 3 D mems, self assembling (via solder) mems, microelectrode arrays, microneedle arrays (claim: no pain!), chemicalsensors, resonators, wings with tiny check-valves, thermoacoustic refrigerator, rotary motors, linear “stepper” motors, high-frequency filters, opticalswitches, cantilever data storage, microcombustors, micro-turbines, pressure sensors (absolute and relative), microphones, stress sensor, laser cavity tuners. 2/15/2002 MEMS 2002 conference report Oshatz and Scheeff

A few devices from Industry • Pressure sensors, particularly for small applications or high temp environments. • Mass flow sensors, based on hot wire anemometers • Acceleration sensors, usually for vehicle air bag deployment • Rate gyros, usually for vehicle stability control. Many designs • Infrared imaging sensor for room temp sensing • Digital Micromirror device from TI • Tiny valves 2/15/2002 MEMS 2002 conference report Oshatz and Scheeff

Funding (North American) • DARPA • NIH • NSF • corporations 2/15/2002 MEMS 2002 conference report Oshatz and Scheeff

Directions in MEMS “This stuff is so cool, why can’t I buy it” –Packaging difficult –Needs to be application driven –Need to design a whole system –Promise of CMOS batch process gives way to sometimes specialized work. –Not as cheap as you’d like… 2/15/2002 MEMS 2002 conference report Oshatz and Scheeff

Some Highlights – a broad range of technology is out there • Electronic Fountain Pen – the only functional MEMS system being carried around in someone’s pocket at the conference • Led-Spec – Flaky but clever prototype for spectroscopic detection of drinking water contaminants using on-chip glow discharge • Hybrid Living/Non-Living Devices – muscle. MEMS, nano-stepper motor powered by and ATP synthase molecule. 2/15/2002 MEMS 2002 conference report Oshatz and Scheeff

Electronic Fountain Pen Gunther Waibel, HSG-IMIT - Germany 2/15/2002 MEMS 2002 conference report Oshatz and Scheeff

LED-Sp. EC(liquid electrode spectral emission chip) Chester G. Wilson, Univ. of Wisconsin, Madison • Water from sample used as anode and cathode (no wear of electrodes) • Water and impurities are sputtered into glow discharge in air at atmosphere • Optical fiber brings signal out to pager sized spectrometer 2/15/2002 MEMS 2002 conference report Oshatz and Scheeff

Opportunities • Focus on systems with a funding source and end-users in mind –For our own needs? –As demonstration of important tech? • Leverage existing skills to bring something to the table –Packaging –Integrating electronics with sensors 2/15/2002 MEMS 2002 conference report Oshatz and Scheeff

Opportunities • An LBNL Microsystems Applications Group? • Dovetails with “molecular foundry”, nano -everything, mesoscale machining? • Exploit the space between a simple, flaky prototype and a fully functional product 2/15/2002 MEMS 2002 conference report Oshatz and Scheeff

Some Contacts • Prof. Liwei Lin (Co-director of BSAC) is ready for us to make the next move – “tell me what you want” • SANDIA – Chris Dyck RF Microsystems group has extended an invitation for a group of LBNL folks to take a tour of the Albuquerque facilities • Business cards and enthusiasm were flowing… 2/15/2002 MEMS 2002 conference report Oshatz and Scheeff

Questions for the Group • What’s the path forward? – A major commitment, investment in a program, buy credibility? – Incremental commitment, proposals, interns? • In house work? Collaborations? • Why would someone work with us? • How would we develop MEMS skills? 2/15/2002 MEMS 2002 conference report Oshatz and Scheeff