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IEEE Robotics and Automation Society Technical Committee (TC) on Semiconductor Manufacturing Automation Technical Committee IEEE Robotics and Automation Society Technical Committee (TC) on Semiconductor Manufacturing Automation Technical Committee Meeting At the 10 th IEEE International Conference on Automation Science and Engineering (IEEE CASE 2014) Venue: T 2 -Narcissus, Fullon Hotel Danshuei, Taipei, Taiwan Time: 6: 00 – 6: 30 pm, Tuesday, August 19, 2014 IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA

Meeting Overview • Review of TC facts – TC data on membership, etc. – Meeting Overview • Review of TC facts – TC data on membership, etc. – Face-to-face meetings – Publication and conference involvement • TC activities – – – TC co-Chairs Special issues Archive presentations from CASE 2014 T-ASE discussion Next services to provide… IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 2

Technical Committee (TC) Brief Data • URL: http: //xs 3 d. kaist. edu/TC-SMA • Technical Committee (TC) Brief Data • URL: http: //xs 3 d. kaist. edu/TC-SMA • Founding Date: August 1, 2001 • Scope: – To promote basic and applied research in semiconductor manufacturing and automation – To provide a forum for exchanging ideas among semiconductor manufacturing researchers and engineers – To facilitate related scientific publications and events (such as special conference sessions, workshops, symposia, and special journal issues) • Membership: – 300 TC members – All the major institutes and companies across Americas, Europe, and Asia IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 3

Committee Board Honorary Board of Chairmen • • • Thomas Wen-Yao CHEN, Director, Technology Committee Board Honorary Board of Chairmen • • • Thomas Wen-Yao CHEN, Director, Technology System Integration Division, TSMC, Taiwan Mu. Der JENG , IEEE Fellow, Professor, Department of Electrical Engineering, National Taiwan Ocean University Dr. Simon YANG, Former COO, SMIC and Former Senior VP & CTO, Chartered Semiconductor Manufacturing Co. Dr. Douglas Chen-Hua YU, Senior Director, Advanced Module Technology Development Division, TSMC Meng. Chu ZHOU, IEEE Fellow, Professor, Dept of Electrical and Computer Eng, New Jersey Institute of Technology Co-Chairs • • • Chen-Fu CHIEN, Distinguished Professor, National Tsing Hua University, Taiwan Mike Tao ZHANG, President, Hoku Materials, USA James R. MORRISON, Associate Professor, Dept of Industrial and Systems Engineering, KAIST, South Korea Academy Chair: Prof. Stanley B. Gershwin, Dept of Mechanical Engineering, MIT Industry Chair: Dave Gross, Director, Global Foundries Membership Chair: Conference Chair: Shi-Chung Chang, Professor, Dept of Electrical Engineering, National Taiwan University Publication Chair: Prof. Ruey-Shan Andy Guo, Professor, Dept of Business Administration, National Taiwan University Regional Chair, China: Prof. Han Ding, Professor, School of Mechanical Engineering, Shanghai Jiao Tong University, China Regional Chair, Europe: Dr. Arieh Greenberg Regional Chair, Israel: Dr. Adar Kalir, Principal Engineer, Intel Corporation Regional Chair, Japan: Kenji Miyake, PMT Corporation Regional Chair, Korea: Prof. Tae-Eog Lee, Professor and Chair, Dept of Industrial Eng, KAIST, South Korea Regional Chair, Taiwan: Shi-Chung Chang, Professor, Dept of Electrical Engineering, National Taiwan University Regional Chair, U. S. A. : Prof. John W. Fowler, Professor and Chair, Dept of Supply Chain Management, Arizona State University, USA IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 4

Face-to-Face TC Meetings • Historically we hold about 2 meetings per year Date Location Face-to-Face TC Meetings • Historically we hold about 2 meetings per year Date Location Conference 2006/09 Tokyo, Japan IEEE/SEMI Int’l Symposium on Semiconductor Manufacturing (ISSM) 2006/10 Shanghai, PRC 2 nd IEEE Conference on Automation Science and Engineering (CASE) 2007/04 Rome, Italy IEEE Int’l Conference on Robotics and Automation (ICRA) 2007/09 Arizona, USA 3 rd IEEE Conference on Automation Science and Engineering (CASE) 2008/08 Washington, DC, USA 4 th IEEE Conference on Automation Science and Engineering (CASE) 2008/10 Tokyo, Japan IEEE/SEMI Int’l Symposium on Semiconductor Manufacturing (ISSM) 2009/08 Bangalore, India 5 th IEEE Conference on Automation Science and Engineering (CASE) 2009/12 Texas, USA 2009 MASM within Winter. Sim 2009 2010/07 California, USA IEEE/SEMI Advanced Semiconductor Manufacturing Conf. (ASMC) 2010/08 Toronto, Canada 6 th IEEE Conference on Automation Science and Engineering (CASE) 2011/08 Arizona, USA 5 th Multidisciplinary International Scheduling Conference (MISTA) 2011/12 Arizona, USA 2011 MASM within Winter. Sim 2011 2012/8 Seoul, Korea 8 th IEEE Conference on Automation Science and Engineering (CASE) 2012/12 Berlin, Germany 2012 MASM within Winter. Sim 2012 2013/08 Madison, WI, USA 9 th IEEE Conference on Automation Science and Engineering (CASE) • • TODAY: IEEE CASE 2014, August 2014, Taipei, Taiwan NEXT MEETING: MASM, December 2014, Savannah, GA, USA IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 5

Most Recent TC Meeting (during CASE 2014, Taipei, Taiwan) Attending (from left to right): Most Recent TC Meeting (during CASE 2014, Taipei, Taiwan) Attending (from left to right): Cheng-Hung Wu (Professor, National Taiwan Univ, Taiwan), John Kuan (Infineon), Jei-Zheng WU (Professor, Soochow Univ, Taiwan), Jonathan Chang (Director, Infineon), Lars Moench (Professor, Univ of Hagen, Germany), Chen-Fu Chien (Professor, National Tsing Hua Univ, Taiwan), Kan Wu (Professor, NTU, Singapore), Chia. Yen Lee (Professor, National Cheng Kung Univ, Taiwan), Jakey Blue (Ecole des Mines St. Etienne, France), James R. Morrison (Professor, KAIST, South Koera), Gian Antonio Susto (Researcher, National University of Ireland, Ireland), Sean Mc. Loone (Professor, Queen’s University of Belfast, Ireland), Claude Yugma (Professor, Ecole des Mines St. Etienne, France), Simone Pampuri (Researchers, National University of Ireland, Ireland), Ja-Hee Kim (Professor, SNUT, South Korea), Li Li (Professor, Tongji Univ, China), Sylvain Housseman (Ph. D candidate, Ecole des Mines St Etienne, France), Junghoon Kim (Ph. D candidate, KAIST, South Korea), Young Jae Jang (Professor, KAIST, South Korea) IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 6

TC Meeting (during IEEE CASE 2014) TC Meeting (during IEEE CASE 2013) Attending (from TC Meeting (during IEEE CASE 2014) TC Meeting (during IEEE CASE 2013) Attending (from left to right): Cheng-Hung Wu (Professor, National Taiwan Univ, Taiwan), John Kuan (Infineon), Jei-Zheng WU (Professor, Soochow Univ, Taiwan), Jonathan Chang (Director, Infineon), Lars Moench (Professor, Univ of Hagen, Germany), Chen. Fu Chien (Professor, National Tsing Hua Univ, Taiwan), Kan Wu (Professor, NTU, Singapore), Chia-Yen Lee (Professor, National Cheng Kung Univ, Taiwan), Jakey Blue (Ecole des Mines St. Etienne, France), James R. Morrison (Professor, KAIST, South Koera), Gian Antonio Susto (Researcher, National University of Ireland, Ireland), Sean Mc. Loone (Professor, Queen’s University of Belfast, Ireland), Claude Yugma (Professor, Ecole des Mines St. Etienne, France), Simone Pampuri (Researchers, National University of Ireland, Ireland), Ja-Hee Kim (Professor, SNUT, South Korea), Li Li (Professor, Tongji Univ, China), Sylvain Housseman (Ph. D candidate, Ecole des Mines St Etienne, France), Junghoon Kim (Ph. D candidate, KAIST, South Korea), Young Jae Jang (Professor, KAIST, South Korea) Attending (from left to right): Sean Mc. Loone (Professor, Queen’s University-Belfast, Ireland), Andrea Matta (Professor, Polytecnico di Milano, Italy), Liang Zhang (Univ. Wisconsin-Milwaukee, USA), Jingshan Li (Professor, Univ. Wisconsin-Madison, USA), Lady #1 (unidentified – please send me your info), Jingang Yi (Professor, SUNJ Rutgers, USA), Gian Antonio Susto (Researcher, Natl Univ Ireland-Maynooth, Ireland), Peter Luh (Professor, Univ Connecticut, USA), Israel Tirkel (Ben Gurion Univ, Israel), Jesus Jimenez (Professor, Texas State University, USA), Qais Hatim Al. Khazraji (Ph. D candidate, Univ Pennsylvania, USA), Li Li (Professor, Tongji Univ, China), Bengt Lennartson (Professor, Chalmers Univ, Sweden), Fei Qiao (Professor, Tongji Univ, China), Dean Grosbard (Engineer, Intel, Israel), James R. Morrison (Professor, KAIST, South Korea), Ruth Shilman (Ph. D candidate, Ben Gurion Univ, Israel), Shi-Chung Chang (Professor, Natl Taiwan Univ, Taiwan), Kar-Way Tan (Professor, Singapore Management Univ, Singapore), Bouhnik Sylvain (Engineering, Micron, Israel), Fan-Tien Cheng (Professor, Natl Cheng Kung Univ, Taiwan), Tongdan Jin (Professor, Texas State Univ, USA) TC Meeting (during MASM 2012) TC Meeting (during IEEE CASE 2012) Attending (from left to right): Ken Fordyce (Engineer, IBM, USA), Argon Chen (Professor, NTU, Attending (from left to right): Thomas Ponsignon (Staff Engineer, Infineon, Germany), Gottfried Schmid Taiwan), Rong Huei Chen (NTU, Taiwan), Toshiya Kaihara (Professor, Kobe University, Japan), (IT Director, Infineon, Germany), Claude Yugma (Professor, EMSE, France), Lars Moench (Professor, Michael Hassoun (Professor, Ariel University Center, Israel), Stephan Deuzere-Peres (Professor, University of Hagen, Germany), Chengbin Chu (Professor, Ecole Centrale Paris, France), Gloria Rodrigues EMSE, France), Israel Tirkel (Professor, Ben-Gurion University, Israel), Hans Ehm (Director, (Research Engineer, STMicroelectronics, Ph. D candidate, EMSE, France), James R. Morrison (Professor, Infineon, Germany), Claude Yugma (Professor, EMSE, France), Jesus Jimenez (Professor, Texas KAIST, Korea), Fan-Tien Cheng (Professor, NCKU, Taiwan), Tae-Eog Lee (Professor, Chair, Dean, State University, USA), Frank Lehmann (Engineer, Infineon, Germany), Konstanze Knoblich KAIST, Korea), Mengchu Zhou (Professor, NJIT, USA), Todor Dimitrov (Engineer, Franhofer IOSB, (Engineer, Infineon, Germany), Gloria Rodrigues (Research Engineer, STMicroelectronics, Ph. D Germany), Naiqi Wu (Professor, Guangdong University fo Technology, China), Adar Kalir (Principal candidate, EMSE, France), Andreas Klemmt (Engineer, Infineon, Germany), Mathias Duemmler Engineer, Intel, Israel), Gian Antonio Susto (Ph. D candidate, University of Padova, Italy), Jingshan Li (Engineer, Infineon, Germany), Pascal Etman (Professor, TU/e, Netherlands), Roland Schelasin (Professor, University of Wisconsin-Madison, Kyungsu Park (Ph. D candidate, KAIST, Korea), Woosung (Engineer, Texas Instruments, USA), Lars Moench (Professor, University of Hagen, Germany), Kim (Ph. D candidate, KAIST, Korea), Byungduk Song (Ph. D candidate, KAIST, Korea), Hong Yue Jin (MS IEEE RAS Technical Committee on Semiconductor Manufacturing Automation Julian Richards (Program Director, Sematech/ISMI, USA), Camera Operator (not shown): James R. candidate, KAIST, Korea), Jungho Park (MS candidate, KAIST, Korea) Morrison (Professor, KAIST, Korea) http: //xs 3 d. kaist. edu/TC-SMA

TC Meeting (during MASM 2011) TC Meeting (during MISTA 2011) Attending (from left to TC Meeting (during MASM 2011) TC Meeting (during MISTA 2011) Attending (from left to right): 1 st Row: James Morrison (Professor, KAIST, South Korea), G 1, G 2, John Fowler (Professor, ASU, USA), G 3, Attila Lengyel, Young Jae Jang (Professor, KAIST, South Korea), G 4, Shekar Krishnaswamy (AMAT, USA) 2 nd Row: G 5, G 6, G 7, G 8, Claude Yugma (Professor, EMSE, France), Tobias Uhlig (Ph. D Candidate, Dresden University of Technology, Germany), G 9, Jingshan Li (Professor, UW-Madison, USA), Pascal Etman (Professor, TU/e, Netherlands), 3 rd Row: G 10, G 11, G 12, G 13, G 14, G 15, Lars Monch (Professor, University of Hagen, Germany), G 17, Oliver Rose (Dresden U Tech. , Germany), Stéphane Dauzère-Pérès (Professor, EMSE, France) Attending (from left to right): Detlef Pabst (Engineer, Global Foundaries, Ph. D Candidate ASU, USA), Felix Cheng (Ph. D Candidate, ASU, USA), Todor Dimitrov (Engineer, Franhofer IOSB, USA), Tobias Uhlig (Ph. D Candidate, Dresden University of Technology, Germany), John Fowler (Professor, ASU, USA), Ken Fordyce (Engineer, IBM, USA), Lars Monch (Professor, University of Hagen, Germany), James Morrison (Professor, KAIST, South Korea), Ketan Khowala (Engineer, Apple, Ph. D Candidate, ASU, USA) TC Meeting (during IEEE CASE 2010) TC Meeting (during IEEE/SEMI ASMC 2010) Attending (from left to right): Zubin Mevawalla (Ph. D. candidate, Georgia Tech), Jan Rothe (Global Foundries), Wei (Victor) Feng (Ph. D. candidate, Tsinghua University) , Li Zheng (Prof. , Haim Albalak (Head, Tefen), James Morrison (Prof. , KAIST), Brett Williams Tsinghua University), Jingshan Li (Prof. , University of Wisconsin-Madison), (Engineer, ON Semiconductor), Lynn Yuwen Zhang, Ph. D. (Sr. Engineer, Intel), Chandresh Mehta (Prof. , University of Michigan), Gentleman #1, Andrea Schirru Darryl Peters (Confluence), Fan-Tien Cheng (Prof. , National Cheng Kung University), (Ph. D. candidate, University of Pavia, Italy), Fan-Tien Cheng (Prof. , National Dave Gross (Director, Global Foundries), Claude Yugma (Prof. , Ecole Nationale Cheng Kung University), James Morrison (Prof. , KAIST), Gentelman #2, Superieure des Mines de Saint-Etienne), Agnes Roussy (Prof. , Ecole Nationale Gentleman #3, Naiqi Wu (Guangdong University of Technology), Cpt. Younghun Superieure des Mines de Saint-Etienne), Kyungsu Park (Ph. D. candidate, KAIST), IEEE RAS Technical Committee on Semiconductor Manufacturing Automation Ahn (MS candidate, KAIST), Kyungsu Park (Ph. D candidate, KAIST) Gyoungwon Park, Ph. D. (Manager, Finisar) http: //xs 3 d. kaist. edu/TC-SMA

TC Meeting (during IEEE CASE 2009) TC Meeting (during ISSM 2008) First Row (from TC Meeting (during IEEE CASE 2009) TC Meeting (during ISSM 2008) First Row (from left): Gentleman #1, Prof. Jingshan Li (U Kentucky) , Prof. Fan-Tien Cheng (NCKU, Taiwan), Prof. James R. Morrison (KAIST), Prof. Min-Hsiung Hung (National Defense U, Taiwan), Prof. Shi-Chung Chang (National Taiwan U), Prof. Argon Chen (National Taiwan U), Prof. Chih-Min Fan First Row (from left): Gentleman #1, Gentleman #2, Prof. James R. Morrison (KAIST), Mike Zhang (Sr. Manager, Spansion), Peter van der Meulen (Chairman and Founder, Blue Shift Technologies), Gentleman #3, Prof. Shi-Chung Chang (National Taiwan University) Please send e-mail to james. [email protected] edu to identify yourself (we’ll update the photo caption). TC Meeting (during IEEE CASE 2008) Please send e-mail to james. [email protected] edu to identify yourself (we’ll update the photo caption). TC Meeting (during IEEE CASE 2007) Second Row (from left): Prof. Jiangshan Li (U Kentucky), a gentleman coming late, Prof. Oliver Rose (Dresden U Tech. , Germany), Prof. Leon Mc. Ginnis (Georgia Tech), Kan Wu (Georgia Tech), President van der Meulen (Blueshift), General Manager David Aires (Intel), Vice President John Behnke (Spansion), Lance Rist (ISMI/SEMATECH), Naiping Keng (Intel), First Row (from left): 9 Deputy Director Chen-Fu Chien (TSMC, Taiwan), Mike Zhang (Spansion), Sr. IEEE RAS Technical Committee on Semiconductor Manufacturing Automation Director Eric Englhardt (Applied Materials), Prof. Fan-Tien Cheng (NCKU, Taiwan) http: //xs 3 d. kaist. edu/TC-SMA

Publication Involvement (1) • Special Issue on Automation Science and Engineering, IEEE Robotics and Publication Involvement (1) • Special Issue on Automation Science and Engineering, IEEE Robotics and Automation Magazine – • Special Issue on e. Manufacturing in the Semiconductor Industry, IEEE Transactions on Automation Science and Engineering (T-ASE) – • – Chen-Fu Chien, Stephane Dauzere-Peres, Milind Dawande, Han Ding, James Morrison, Jeff Pettinato, Jingang Yi (Guest Editors) 32 papers submitted; published Jan 2011 Special Issue on Automation in Green Technology for IEEE Transactions on Automation Science and Engineering (T-ASE) – – • Thomas Chen, Mike Tao Zhang, Chen-Fu Chien, John Fowler, and George Shanthikumar (Guest Editors); 37 papers submitted; published in Oct 2007 Special Issue on Equipment and Operations Automation in the Semiconductor Industry, IEEE Transactions on Automation Science and Engineering (T-ASE) – • Mike Tao Zhang (Guest Editor); Published in Dec 2006; 3 articles on semiconductor manufacturing Jingshan Li, James R. Morrison, Mike Tao Zhang, Masaru Nakano, Stephan Biller, Bengt Lennartson (Guest Editors) Publication scheduled 2013 Special Issue on Selected Papers from CASE 2012 and MASM 2012 for Computers and Operations Research (C&OR) – – Lars Moench (Lead Guest Editor), Argon Chen, Andy Myoungsoo Ham, James R. Morrison (Guest Editors) To appear end 2014 or early 2015! IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 10

Publication Involvement (2) • Special Issue for Computers & Industrial Engineering on “Manufacturing Intelligence Publication Involvement (2) • Special Issue for Computers & Industrial Engineering on “Manufacturing Intelligence and Automation in Semiconductor Industry”. – – • Special Issue of the Journal of Industrial Engineering: Theory, Applications and Practice on “The Roles of Industrial Engineers in the Semiconductor Industry”. – – • TC co-chair Chen-Fu Chien serves as Lead Guest Editor, TC Member Lars Moench servers as Guest Editor and TC Member Jei-Zheng Wu serves as Guest Editor. Paper submission deadline September 30, 2014. Special Issue of Flexible Services and Manufacturing Journal on “Big Data Analytics for Digital Decisions in Services and Manufacturing”. – – • TC co-chair Chen-Fu Chien serves as Lead Guest Editor and TC co-chair James R. Morrison serves as Guest Editor. Paper submissions deadline October 31, 2014. TC co-chair Chen-Fu Chien serves as Lead Guest Editor. Paper submissions deadline March 31, 2015. Considering a Special Issue on Automation for Next Generation High Technology Manufacturing (with a focus on 450 mm wafer manufacturing), IEEE Transactions on Automation Science and Engineering (T-ASE) – Candidates for Guest Editors? – Publication target TBD IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 11

Conference Involvement (1) • IEEE Conference on Automation Science and Engineering, Shanghai, 2006 – Conference Involvement (1) • IEEE Conference on Automation Science and Engineering, Shanghai, 2006 – Invited Session on Semiconductor Manufacturing: Fan-Tien Cheng, CC Huang, Naiqi Wu, and Mike Tao Zhang (Session – – • • • Co-Chairs); 14 papers accepted Tech tours to Intel and Semiconductor Manufacturing Int'l Company (SMIC): Mike Tao Zhang (Organizer); 30 people joined Tutorial/Workshop on e. Manufacturing for the Semiconductor Industry: Fan-Tien Cheng, Min-Hsiung Hung, Jonathan Chang, and Mike Tao Zhang (Organizers) 18 th IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) , Stresa, Italy, June 11 -12, 2007 – Dave Gross (Conference Co-Chair). IEEE/SEMI e. Manufacturing Symposium, Taipei, Taiwan, June, 2007 – Thomas Chen and Mu. Der Jeng (Steering Committee members) IEEE Conference on Automation Science and Engineering (IEEE CASE 2007), Phoenix, USA, Sept 2007 – Mike Tao Zhang (Program Chair); Intel Fellow Dev Pillai (Keynote Speaker) – John Fowler, Chen-Fu Chien, Oliver Rose, and James Wuerfel (Co-Chairs): The 2007 Int’l Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM 2007) – as a part of IEEE CASE 2007 • • • 4 th IEEE Conference on Automation Science and Engineering, Washington DC, USA, August 2008. – Mengchu Zhou (General Chair). Mike Tao Zhang (Steering Committee member) 2008 International Symposium on Semiconductor Manufacturing, Tokyo, Japan, Oct. 2008. – Shi-Chung Chang (Program Committee) Joint symposium of "AEC/APC-Asia 2008" and "e-Manufacturing & DFM Symposium 2008", Hsin. Chu, Taiwan, Nov. 2008. – Thomas Chen (Steering Committee member) 4 th Int’l Conference on Modeling and Analysis of Semiconductor Manufacturing, Miami, Florida, USA, Dec. 2008. – John Fowler and Chen-Fu Chien (Conference Chairs). Mike Tao Zhang (Int’l Advisory Committee member). Joint 20 th Advanced Semiconductor Manufacturing Conference and 2009 International Symposium on Semiconductor Manufacturing, Berlin, Germany, May 2009. – Shi-Chung Chang (Program committee) IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 12

Conference Involvement (2) • • 10 th International Conference on Automation Technology (Automation 2009), Conference Involvement (2) • • 10 th International Conference on Automation Technology (Automation 2009), Tainan (Taiwan), June 2009. – Meng-Chu Zhou and Mike Tao Zhang (Int’l Advisory Committee members) th IEEE Conference on Automation Science and Engineering, Bangalore, India, Aug 2009 5 – Mike Tao Zhang, Meng. Chu Zhou (Steering Committee). Tae-Eog Lee (Track Co-Chair), James Morrison (Track Co-Chair). – Shi-Chung Chang, Mu. Der Jeng, Wai Kin Victor Chan, Shengwei Ding, Fei Qiao, Naiqi Wu, Jingang Yi (Program Committee). – Shi-Chung Chang and Argon Chen, organize special session on Yield Symptom Identification 2009 International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) , Austin, Texas, Dec 2009 – Shekar Krishnaswamy, Scott Mason (Conference Organizers) – Lars Mönch, Stephane Dauzere-Peres, Oliver Rose (Track Chairs) IEEE International Conference on Robotics and Automation, Anchorage, Alaska, May 2010 – James Morrison (Program Committee) 21 st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference, San Francisco, USA, July 2010 – Special session on Reducing Cost and Maximizing Equipment Productivity, co-chair James Morrison – Shi-Chung Chang (Technical Committee) 6 th Annual IEEE CASE 2010 – Special session on Green Tech Automation, chairs James Morrison and Jingshan Li – Semiconductor Manufacturing session chaired by James Morrison and Jingshan Li th MISTA 5 – John Fowler (Conference Organizer) – Ken Fordyce (Plenary Speaker) – Focus session on Semiconductor Scheduling chaired by James Morrison th MASM (within Wintersim 2011) 7 – Stephane Dauzere-Peres, John Fowler (Conference Organizers) – Lars Monch, James Morrison (Track Chairs) IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 13

Conference Involvement (3) • 8 th IEEE Conference on Automation Science and Engineering (CASE Conference Involvement (3) • 8 th IEEE Conference on Automation Science and Engineering (CASE 2012), Seoul, Korea – – Organizing Committee: Tae-Eog Lee (Award Chair), James R. Morrison (Workshop Chair) – Technical Program Committee: Fan-Tien Cheng (Information Automation) – Conference Editorial Board: Wai Kin Victor Chan (Editor), Fan-Tien Cheng (Associate Editor), Jingshan Li (Associate Editor), James R. Morrison (Associate Editor), Jingang Yi (Associate Editor), Claude Yugma (Associate Editor), many reviewers – Plenary Talk: Tae-Eog Lee – 4 special sessions (22 papers in total): “Process Control Automation”, Chair Fan-Tien Cheng, co-Chair James R. Morrison, “Petri Nets in Automation”, co-Chair Mengchu Zhou, “Scheduling Methods for Semiconductor Manufacturing, ” Chair Lars Moench, co-Chair Claude Yugma, Modeling, Analysis and Operation of High Technology Manufacturing”, co-Chair Adar Kalir – • Steering Committee: Mengchu Zhou, Mike Tao Zhang Workshop on “Emerging Topics from Special Sessions at CASE 2012”, Presenter Jingshan Li, Presenter Lars Moench, Chair/Presenter James R. Morrison, Presenter Claude Yugma 8 th International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM 2012 within Wintersim 2012), Berlin, Germany – Conferenece Organizers: Argon Chen, Andy Myoungsoo Ham and Lars Moench – Wintersim General Chair: Oliver Rose – Wintersim Track Coordinators: John Fowler – International Program Committee: Thomas Chen, Chen-Fu Chien, Hans Ehm, Stephane Dauzere-Peres, John Fowler, Cathal Heavey (membership invite sent), Jesus Jimenez, Andreas Klemmt (membership invitation sent), Tae-Eog Lee, Scott Mason, James Morisson, Dima Nazzal (membership invitation sent), Israel Tirkel, Gerald Weigert IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 14

Conference Involvement (4) • 9 th IEEE Conference on Automation Science and Engineering, Madison, Conference Involvement (4) • 9 th IEEE Conference on Automation Science and Engineering, Madison, WI, USA, August 2013. – Steering Committee: TC emeritus co-chair Mengchu Zhou, TC co-chair Mike Tao Zhang. – International Advisory Committee: TC emeritus co-chair Mengchu Zhou, TC co-chair Mike Tao Zhang. – Organizing Committee: TC member Jingshan Li (Conference Co-Chair), TC co-chair James R. Morrison (Special Sessions Chair). – Program Committee (PC): TC member Shi-Chung Chang (PC Member), TC regional chair Korea Tae-Eog Lee (PC Member), Jingang Yi (PC Member). – Editorial Board: TC founding member Fan-Tien Cheng (Editor), TC co-chair James R. Morrison (Editor). – Special Sessions at CASE 2013 organized by TC members • • “Markovian and Queueing Models for Semiconductor Manufacturing Systems” organized by TC member Israel Tirkel and TC co-chair James R. Morrison. • “Decision Analysis, Manufacturing Intelligence, and Optimization for Semiconductor Manufacturing” co-organized by TC co-chair Chen-Fu Chien. ISSM 2013, Taiwan – • “Virtual Metrology and Predictive Maintenance” co-organized TC founding member Fan-Tien Cheng. • • “Modeling, Analysis, Operation, and Control of Cluster Tools” organized by TC emeritus co-chair Mengchu Zhou and TC member Naiqi Wu. Organizing committee: Argon Chen, Shi-Chung Chang, Fan-Tien Cheng 9 th International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) within the 2013 Winter Simulation Conference, Washington, D. C. , USA, December 2013. – Conference Organizers: TC member Claude Yugma (Conference Organizer), TC member Jesus Jimenez (Conference Organizer). – International Program Committee: TC members Stephane Dauzere-Peres, Hans Ehm, Kenneth Fordyce, John Fowler, Cathal Heavey, DJ Kim, Tae-Eog Lee, Lars Moench, Oliver Rose, Israel Tirkel and Gerald Weigert (International Program Committee). IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 15

Conference Involvement (5) • 2014 International Symposium on Semiconductor Manufacturing Intelligence (2014 ISMI), Taipei, Conference Involvement (5) • 2014 International Symposium on Semiconductor Manufacturing Intelligence (2014 ISMI), Taipei, Taiwan, August 2014. – Honorary Co-Chairs: TC Regional Chair Taiwan Shi-Chung Chang and TC co-chair James R. Morrison – Program Committee (PC): TC Member Jei-Zheng Wu (PC Chair), TC Member Lars Moench (PC Co-Chair), TC Member Thomas Ponsignon, TC Member Fei Qiao – • General Chair: TC co-chair Chen-Fu Chien – Plenary Talks: TC Board Member Meng. Chu Zhou, TC Member Kan Wu, TC Member Lars Moench, TC Member Ken Fordyce, TC co-chair James R. Morrison 10 th IEEE Conference on Automation Science and Engineering (CASE 2014), Taipei, Taiwan, August 2014. – Steering Committee: TC emeritus co-chair Mengchu Zhou (Chair), TC co-chair Mike Tao Zhang. – International Advisory Committee: TC emeritus co-chair Mengchu Zhou, TC co-chair Mike Tao Zhang. – Organizing Committee: TC Founding Member Fan-Tien Cheng (Program Chair), TC co-chair Chen-Fu Chien (Exhibition Chair), TC co-chair James R. Morrison (Publicity Chair) – Program Committee: TC Regional Chair Taiwan Shi-Chung Chang, TC Regional Chair Korea Tae-Eog Lee – Conference Editorial Board: TC Member Jingshan Li (Editor), TC Member Lars Moench (Associate Editor), TC Member Kan Wu (Associate Editor), TC Member Naiqi Wu (Associate Editor), TC Member Jingang Yi (Associate Editor) – Special sessions at CASE 2014 organized by TC members • “Performance Evaluation for Production Systems and Supply Chains” organized by TC Member Kan Wu • “Quantitative Methods in Semiconductor Manufacturing” organized by TC co-chair James R. Morrison and TC Member Lars Moench • “Quantitative Methods in Computer-Assisted Detection and Diagnosis” by TC Member Argon Chen • – “Computational Intelligence in Scheduling” co-organized by TC co-chair Chen-Fu Chien • “Advanced Process Control for Semiconductor Manufacturing” by TC Member Gian Antonio Susto and TC Member Sean Mc. Loone Workshop organization at CASE 2014 by TC members • “Recent Advances and Emerging Topics in Sustainable Production Automation” co-organized by TC Member Jingshan Li • • “Internet of Things: Research and Practice” co-organized by TC emeritus co-chair Meng. Chu Zhou • “Workshop on Advanced Intelligent Automation Technology” co-organized by TC Founding Member Fan-Tien Cheng 10 th International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) within the 2014 Winter Simulation Conference, Savannah, Georgia, USA, December 2014. – Conference Organizers: TC Regional Chair USA John Fowler, TC Member Lars Moench and TC co-chair James R. Morrison – International Program Committee: TC members Joey Chang, Shi-Chung Chang, Argon Chen, Fan-Tien Cheng, Chen-Fu Chien, Guy Curry, Stephane Dauzere-Peres, Hans Ehm. Gary Godding, Andy Ham, Cathal Heavey, Keung Hsu, Jesus A. Jimenez, Baris Kacar, Adar Kalir, DJ Kim. Andreas Klemmt. Tae-Eog Lee. Dae-Eun Lim, Kenji Miyake, Devadas Pillai, Jürgen Pilz, Thomas Ponsignon, Fei Qiao, Oliver Rose, Israel Tirkel, Gerald Weigert, Jei-Zheng Wu, Kan Wu, Claude Yugma and Ken Fordyce IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 16

TC Activities (1) • TC co-chairs – 3 people – Serve 3 year term TC Activities (1) • TC co-chairs – 3 people – Serve 3 year term with opportunity for one consecutive reappointment – May return to service after a 3 year hiatus • Retiring – Mike Zhang is scheduled to retire end of 2014 after many years of very much appreciated service – James Morrison is scheduled to retire at end of 2015 • Nominations for Membership Chair will be considered IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 17

TC Activities (2) • Special issues – Special Issue for Computers & Industrial Engineering TC Activities (2) • Special issues – Special Issue for Computers & Industrial Engineering on “Manufacturing Intelligence and Automation in Semiconductor Industry”. Paper submissions deadline October 31, 2014. – Special Issue of the Journal of Industrial Engineering: Theory, Applications and Practice on “The Roles of Industrial Engineers in the Semiconductor Industry”. Paper submission deadline September 30, 2014. – Special Issue of Flexible Services and Manufacturing Journal on “Big Data Analytics for Digital Decisions in Services and Manufacturing”. Paper submissions deadline March 31, 2015. – Considering a Special Issue on Automation for Next Generation High Technology Manufacturing (with a focus on 450 mm wafer manufacturing) IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 18

TC Activities (3) • TC website archive for CASE and MASM presentations! – CASE TC Activities (3) • TC website archive for CASE and MASM presentations! – CASE 2012 and CASE 2013 special sessions presentations archived!! – Want to archive CASE 2014 presentations!!! – ACTION: Please e-mail me your presentation from CASE (voluntary!) james. [email protected] edu • ISMI 2015, CASE 2015, MASM 2015 – Special or organized sessions! Who would like to help? IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 19

Discussion Topics (1) • How can the TC better serve the community? – Archive Discussion Topics (1) • How can the TC better serve the community? – Archive for simulation models? (Plan to link to MIMAC models) – Archive for case study reports? SUGGEST: Bibliograpy on our website!!! – Archive for tutorials? – Archive may mean a link to the file stored elsewhere or we can host the file – Please consider to let me know about your service activities so that I can add it to our TC service lists! • T-ASE discussion IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 20

Discussion Topics (2) • How to join? – Send me an e-mail: james. morrison@kaist. Discussion Topics (2) • How to join? – Send me an e-mail: james. [email protected] edu • Want to talk later? Have ideas later. . – Contact James Morrison (see e-mail above) • Please consider to submit to our special issues • Please e-mail me your CASE 2014 presentation IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 21

System Modeling and Control with Resource-Oriented Petri Nets / Edition 1 Authors: Meng. Chu System Modeling and Control with Resource-Oriented Petri Nets / Edition 1 Authors: Meng. Chu Zhou, Naiqi Wu October 2009 IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 22

IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 23