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IEEE Robotics and Automation Society Technical Committee (TC) on Semiconductor Manufacturing Automation Technical Committee IEEE Robotics and Automation Society Technical Committee (TC) on Semiconductor Manufacturing Automation Technical Committee Meeting At the 5 th Multidisciplinary International Scheduling Conference (MISTA 2011) Venue: Xavier Conference Room, Tempe Mission Palms, Phoenix, AZ, USA Time: 12: 35 – 12: 50 pm, Thursday, August 11, 2011 After the session S 7 A entitled “Semiconductor Scheduling” IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA

Meeting Overview • Review of TC facts – Face-to-face meetings – TC data on Meeting Overview • Review of TC facts – Face-to-face meetings – TC data on membership, etc. • TC activities – Publication involvement – Conference involvement • Discussion topics – Conferences at which to hold meetings (academic/industry) – Special issue for 2013 associated with IEEE CASE 2012 – Others? IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 2

Technical Committee (TC) Brief Data • URL: http: //xs 3 d. kaist. edu/TC-SMA • Technical Committee (TC) Brief Data • URL: http: //xs 3 d. kaist. edu/TC-SMA • Founding Date: August 1, 2001 • Scope: – To promote basic and applied research in semiconductor manufacturing and automation – To provide a forum for exchanging ideas among semiconductor manufacturing researchers and engineers – To facilitate related scientific publications and events (such as special conference sessions, workshops, symposia, and special journal issues) IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 3

Face-to-Face TC Meetings • • • Sept. 25, 2006, Tokyo (IEEE/SEMI Int’l Symposium on Face-to-Face TC Meetings • • • Sept. 25, 2006, Tokyo (IEEE/SEMI Int’l Symposium on Semiconductor Manufacturing) Oct. 9, 2006, Shanghai (IEEE/SEMI Int’l Conference on Automation Science and Engineering) April 2007, Roma (IEEE Int’l Conference on Robotics and Automation) Sept. 2007, Scottsdale (IEEE Conference on Automation Science and Engineering) August 2008, Washington DC (IEEE Conference on Automation Science and Eng. ) October 2008, Tokyo (International Symposium on Semiconductor Manufacturing) August 2009, Bangalore, India (IEEE Conference on Automation Science and Eng. ) December 2009, Austin, TX, USA (2009 MASM within Winter. Sim 2009) July 2010, San Francisco, USA (21 st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference) August 2010, Toronto, Canada (6 th IEEE Conference on Automation Science and Eng. ) August 2011, Phoenix, AZ, USA (5 th Multidisciplinary International Scheduling Conf. ) NEXT MEETING: December 2011, Phoenix, AZ, USA (2011 MASM - Modeling and Analysis of Semiconductor Manufacturing conference, within Winter. Sim 2011) IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 4

Most Recent TC Meeting (during MISTA 2011) Attending (from left to right): Detlef Pabst Most Recent TC Meeting (during MISTA 2011) Attending (from left to right): Detlef Pabst (Engineer, Global Foundaries, Ph. D Candidate ASU, USA), Felix Cheng (Ph. D Candidate, ASU, USA), Todor Dimitrov (Engineer, Franhofer IOSB, USA), Tobias Uhlig (Ph. D Candidate, Dresden University of Technology, Germany), John Fowler (Professor, ASU, USA), Ken Fordyce (Engineer, IBM, USA), Lars Monch (Professor, University of Hagen, Germany), James Morrison (Professor, KAIST, South Korea), Ketan Khowala (Engineer, Apple, Ph. D Candidate, ASU, USA) Please send e-mail to james. [email protected] edu for updates to the caption. IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 5

Next TC Meeting (during MASM 2011) Most Recent TC Meeting (during MISTA 2011) Attending Next TC Meeting (during MASM 2011) Most Recent TC Meeting (during MISTA 2011) Attending (from left to right): Detlef Pabst (Engineer, Global Foundaries, Ph. D Candidate ASU, USA), Felix Cheng (Ph. D Candidate, ASU, USA), Todor Dimitrov (Engineer, Franhofer IOSB, USA), Tobias Uhlig (Ph. D Candidate, Dresden University of Technology, Germany), John Fowler (Professor, ASU, USA), Ken Fordyce (Engineer, IBM, USA), Lars Monch (Professor, University of Hagen, Germany), James Morrison (Professor, KAIST, South Korea), Ketan Khowala (Engineer, Apple, Ph. D Candidate, ASU, USA) TC Meeting (during IEEE CASE 2010) TC Meeting (during IEEE/SEMI ASMC 2010) Attending (from left to right): Zubin Mevawalla (Ph. D. candidate, Georgia Tech), Jan Rothe (Global Foundries), Wei (Victor) Feng (Ph. D. candidate, Tsinghua University) , Li Zheng (Prof. , Haim Albalak (Head, Tefen), James Morrison (Prof. , KAIST), Brett Williams Tsinghua University), Jingshan Li (Prof. , University of Wisconsin-Madison), (Engineer, ON Semiconductor), Lynn Yuwen Zhang, Ph. D. (Sr. Engineer, Intel), Chandresh Mehta (Prof. , University of Michigan), Gentleman #1, Andrea Schirru Darryl Peters (Confluence), Fan-Tien Cheng (Prof. , National Cheng Kung University), (Ph. D. candidate, University of Pavia, Italy), Fan-Tien Cheng (Prof. , National Dave Gross (Director, Global Foundries), Claude Yugma (Prof. , Ecole Nationale Cheng Kung University), James Morrison (Prof. , KAIST), Gentelman #2, Superieure des Mines de Saint-Etienne), Agnes Roussy (Prof. , Ecole Nationale Gentleman #3, Naiqi Wu (Guangdong University of Technology), Cpt. Younghun Superieure des Mines de Saint-Etienne), Kyungsu Park (Ph. D. candidate, KAIST), IEEE RAS Technical Committee on Semiconductor Manufacturing Automation Ahn (MS candidate, KAIST), Kyungsu Park (Ph. D candidate, KAIST) Gyoungwon Park, Ph. D. (Manager, Finisar) http: //xs 3 d. kaist. edu/TC-SMA

TC Meeting (during IEEE CASE 2009) TC Meeting (during ISSM 2008) First Row (from TC Meeting (during IEEE CASE 2009) TC Meeting (during ISSM 2008) First Row (from left): Gentleman #1, Prof. Jingshan Li (U Kentucky) , Prof. Fan-Tien Cheng (NCKU, Taiwan), Prof. James R. Morrison (KAIST), Prof. Min-Hsiung Hung (National Defense U, Taiwan), Prof. Shi-Chung Chang (National Taiwan U), Prof. Argon Chen (National Taiwan U), Prof. Chih-Min Fan First Row (from left): Gentleman #1, Gentleman #2, Prof. James R. Morrison (KAIST), Mike Zhang (Sr. Manager, Spansion), Peter van der Meulen (Chairman and Founder, Blue Shift Technologies), Gentleman #3, Prof. Shi-Chung Chang (National Taiwan University) Please send e-mail to james. [email protected] edu to identify yourself (we’ll update the photo caption). TC Meeting (during IEEE CASE 2008) Please send e-mail to james. [email protected] edu to identify yourself (we’ll update the photo caption). TC Meeting (during IEEE CASE 2007) Second Row (from left): Prof. Jiangshan Li (U Kentucky), a gentleman coming late, Prof. Oliver Rose (Dresden U Tech. , Germany), Prof. Leon Mc. Ginnis (Georgia Tech), Kan Wu (Georgia Tech), President van der Meulen (Blueshift), General Manager David Aires (Intel), Vice President John Behnke (Spansion), Lance Rist (ISMI/SEMATECH), Naiping Keng (Intel), First Row (from left): 7 Deputy Director Chen-Fu Chien (TSMC, Taiwan), Mike Zhang (Spansion), Sr. IEEE RAS Technical Committee on Semiconductor Manufacturing Automation Director Eric Englhardt (Applied Materials), Prof. Fan-Tien Cheng (NCKU, Taiwan) http: //xs 3 d. kaist. edu/TC-SMA

Membership • 258 TC members • All the major institutes and companies across Americas, Membership • 258 TC members • All the major institutes and companies across Americas, Europe, and Asia • New member recruiting: – August 2008, GOLD (Graduates of the Last Decade) lunch – April 2007, GOLD (Graduates of the Last Decade) lunch • Nominations and Awards: – – Dev Pillai (Intel Fellow), T-ASE Advisory Board, 2007 Adar Kalir (Intel), T-ASE Associate Editor, 2007 Chen-Fu Chien (TSMC & Tsinghua U), T-ASE Associate Editor, 2007 Mike Tao Zhang, IEEE RAS Early Career Award in Robotics and Automation, 2008 – Meng-Chu Zhou, nominated for IEEE RAS Distinguished Lecturer, 2009 – Meng-Chu Zhou, selected as Sr. Editor of IEEE T-ASE, 2009 IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 8

Committee Board Honorary Chairs • • Dr. Simon Yang, Senior Vice President & Chief Committee Board Honorary Chairs • • Dr. Simon Yang, Senior Vice President & Chief Technology Officer, Chartered Semiconductor Manufacturing Co. Dr. Douglas Chen-Hua Yu, Senior Director, Advanced Module Technology Development Division, TSMC Mu. Der JENG , IEEE Fellow, Professor, Department of Electrical Engineering, National Taiwan Ocean University Meng. Chu ZHOU, IEEE Fellow, Professor, Dept of Electrical and Computer Eng, New Jersey Institute of Technology Co-Chairs • • • Thomas Wen-Yao CHEN, Director, Technology System Integration Division, TSMC Mike Tao ZHANG, VP Tianwei New Energy Holdings & Executive Vice President, US-China Green Energy Council James R. Morrison, Assistant Professor, Dept of Industrial and Systems Engineering, KAIST, South Korea Academy Chair: Prof. Stanley B. Gershwin, Dept of Mechanical Engineering, MIT Industry Chair: Dave Gross, Director, Global Manufacturing Systems Technology, Advanced Micro Devices (AMD) Membership Chair: Dr. Chen-Fu Chien, Deputy Director, Industrial Eng. , TSMC Conference Chair: Prof. Shi-Chuang Chang, Dept of Electrical Engineering, National Taiwan University Publication Chair: Prof. Ruey-Shan Andy Guo, Chair, Dept of Business Administration, National Taiwan University Regional Chair, China: Prof. Han Ding, Cheung Kong Chair Professor and Director, Advanced Electronic Mfg Center, Shanghai Jiao Tong Univ. Regional Chair, Europe: Dr. Arieh Greenberg, Senior Principal, Qimonda Regional Chair, Israel: Dr. Adar Kalir, Staff Engineer, Intel Corporation Regional Chair, Japan: Kenji Miyake, Chief Technology Officer, GEN Inc. Regional Chair, Korea: Prof. Tae-Eog Lee, Dept of Industrial Eng, Korea Advanced Institute of Science and Technology Regional Chair, Taiwan: Prof. Shi-Chung Chang, Dept of Electrical Eng, National Taiwan University Regional Chair, U. S. A. : Prof. John W. Fowler, Dept of Industrial Engineering, Arizona State University IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 9

Publication Involvement • Special Issue on Automation Science and Engineering, IEEE Robotics and Automation Publication Involvement • Special Issue on Automation Science and Engineering, IEEE Robotics and Automation Magazine – • Special Issue on e. Manufacturing in the Semiconductor Industry, IEEE Transactions on Automation Science and Engineering (T-ASE) – • – Chen-Fu Chien, Stephane Dauzere-Peres, Milind Dawande, Han Ding, James Morrison, Jeff Pettinato, Jingang Yi (Guest Editors) 32 papers submitted; published Jan 2011 Special Issue on Automation in Green Technology for IEEE Transactions on Automation Science and Engineering (T-ASE) – – • Thomas Chen, Mike Tao Zhang, Chen-Fu Chien, John Fowler, and George Shanthikumar (Guest Editors); 37 papers submitted; published in Oct 2007 Special Issue on Equipment and Operations Automation in the Semiconductor Industry, IEEE Transactions on Automation Science and Engineering (T-ASE) – • Mike Tao Zhang (Guest Editor); Published in Dec 2006; 3 articles on semiconductor manufacturing Jingshan Li, James R. Morrison, Mike Tao Zhang, Masaru Nakano, Stephan Biller, Bengt Lennartson (Guest Editors) Publication scheduled October 2012 Planning a Special Issue on Automation for Next Generation High Technology Manufacturing (with a focus on 450 mm wafer manufacturing) – – In conjunction with IEEE CASE 2012 Publication target early 2013 IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 10

Conference Involvement • IEEE Conference on Automation Science and Engineering, Shanghai, 2006 – Invited Conference Involvement • IEEE Conference on Automation Science and Engineering, Shanghai, 2006 – Invited Session on Semiconductor Manufacturing: Fan-Tien Cheng, CC Huang, Naiqi Wu, and Mike Tao Zhang (Session – – • • • Co-Chairs); 14 papers accepted Tech tours to Intel and Semiconductor Manufacturing Int'l Company (SMIC): Mike Tao Zhang (Organizer); 30 people joined Tutorial/Workshop on e. Manufacturing for the Semiconductor Industry: Fan-Tien Cheng, Min-Hsiung Hung, Jonathan Chang, and Mike Tao Zhang (Organizers) 18 th IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) , Stresa, Italy, June 11 -12, 2007 – Dave Gross (Conference Co-Chair). IEEE/SEMI e. Manufacturing Symposium, Taipei, Taiwan, June, 2007 – Thomas Chen and Mu. Der Jeng (Steering Committee members) IEEE Conference on Automation Science and Engineering (IEEE CASE 2007), Phoenix, USA, Sept 2007 – Mike Tao Zhang (Program Chair); Intel Fellow Dev Pillai (Keynote Speaker) – John Fowler, Chen-Fu Chien, Oliver Rose, and James Wuerfel (Co-Chairs): The 2007 Int’l Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM 2007) – as a part of IEEE CASE 2007 • • • 4 th IEEE Conference on Automation Science and Engineering, Washington DC, USA, August 2008. – Mengchu Zhou (General Chair). Mike Tao Zhang (Steering Committee member) 2008 International Symposium on Semiconductor Manufacturing, Tokyo, Japan, Oct. 2008. – Shi-Chung Chang (Program Committee) Joint symposium of "AEC/APC-Asia 2008" and "e-Manufacturing & DFM Symposium 2008", Hsin. Chu, Taiwan, Nov. 2008. – Thomas Chen (Steering Committee member) 4 th Int’l Conference on Modeling and Analysis of Semiconductor Manufacturing, Miami, Florida, USA, Dec. 2008. – John Fowler and Chen-Fu Chien (Conference Chairs). Mike Tao Zhang (Int’l Advisory Committee member). Joint 20 th Advanced Semiconductor Manufacturing Conference and 2009 International Symposium on Semiconductor Manufacturing, Berlin, Germany, May 2009. – Shi-Chung Chang (Program committee) IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 11

Conference Involvement • • 10 th International Conference on Automation Technology (Automation 2009), Tainan Conference Involvement • • 10 th International Conference on Automation Technology (Automation 2009), Tainan (Taiwan), June 2009. – Meng-Chu Zhou and Mike Tao Zhang (Int’l Advisory Committee members) th IEEE Conference on Automation Science and Engineering, Bangalore, India, Aug 2009 5 – Mike Tao Zhang, Meng. Chu Zhou (Steering Committee). Tae-Eog Lee (Track Co-Chair), James Morrison (Track Co-Chair). – Shi-Chung Chang, Mu. Der Jeng, Wai Kin Victor Chan, Shengwei Ding, Fei Qiao, Naiqi Wu, Jingang Yi (Program Committee). – Shi-Chung Chang and Argon Chen, organize special session on Yield Symptom Identification 2009 International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) , Austin, Texas, Dec 2009 – Shekar Krishnaswamy, Scott Mason (Conference Organizers) – Lars Mönch, Stephane Dauzere-Peres, Oliver Rose (Track Chairs) IEEE International Conference on Robotics and Automation, Anchorage, Alaska, May 2010 – James Morrison (Program Committee) 21 st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference, San Francisco, USA, July 2010 – Special session on Reducing Cost and Maximizing Equipment Productivity, co-chair James Morrison – Shi-Chung Chang (Technical Committee) 6 th Annual IEEE CASE 2010 – Special session on Green Tech Automation, chairs James Morrison and Jingshan Li – Semiconductor Manufacturing session chaired by James Morrison and Jingshan Li th MISTA 5 – John Fowler (Conference Organizer) – Ken Fordyce (Plenary Speaker) – Focus session on Semiconductor Scheduling chaired by James Morrison th MASM (within Wintersim 2011) 7 – Stephane Dauzere-Peres, John Fowler (Conference Organizers) – Lars Monch, James Morrison (Track Chairs) IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 12

Discussion Topics • How to join? – Send me an e-mail: james. morrison@kaist. edu Discussion Topics • How to join? – Send me an e-mail: james. [email protected] edu • Future special session ideas? – What academic conferences? – What industry conferences? • IEEE CASE 2012, MASM 2011 & 2012 None specifically preferred (ASMC, ISSM, IC-APC, etc. ) Future special issues – In planning: Automation for Next Generation High Tech Manufacturing – Emerging technologies? 450 mm transition – Emerging needs? 450 mm transition • • • Future directions or focus areas for the TC? Volunteers to help develop special sessions/issues? How can the TC better serve the community? Green tech… how to get in? Contact James Morrison IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 13

IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 14