CORIAL LOCATION Paris Geneva Lyon Grenoble § CORIAL is located in Grenoble, close to Lyon and Geneva, § In the Heart of the French Silicon Valley, § In the Middle of Strong Research Centers, § Excellent Machining and Electronics Industry. CORIAL
CORIAL HEADQUARTERS Paris Lyon Grenoble CORIAL Technology Center
CORIAL FACTORY CORIAL Clean Room for System Assembly & Research Lab
HISTORY 1983: NEXTRAL, a company selling plasma etching and deposition systems, was founded by Pierre Parrens researcher with the CEA-LETI, 1988: NEXTRAL joins the Alcatel Group and becomes Alcatel-Nextral, 1991: Alcatel-Nextral is sold to Pierre Parrens by Alcatel and becomes again NEXTRAL, 1996: A Join Venture is created between NEXTRAL and Balzers Process Systems. NEXTRAL becomes BPS-NEXTRAL and, then, Unaxis-Nextral, 2001: Unaxis-Nextral becomes 100% Unaxis and is merged with Unaxis. France (2002), 2004: CORIAL, a company manufacturing plasma etching and deposition systems, is founded by formers employees of Unaxis-NEXTRAL with the help of Pierre Parrens.
CORIAL 2005 PRODUCTS The products available in 2005 are: § The Corial 200, a system equipped either Corial 200 IL Corial 200 RL Corial 700 with reactive ion etching reactors (RIE) or new high density plasma reactors (HDP and ICP) having a wide range of working conditions and allowing highly uniform processes on large areas (Ø 200 mm), § The Corial D 250, a PECVD system equipped with an isothermal pressurized plasma reactor for low stress and high quality film deposition, § The Corial 200 L, equipped with the new high density plasma reactors and a vacuum load-lock, § The Corial 300, equipped with a new reactive ion etching reactor (RIE) dedicated to failure and low yield analysis applications on Ø 300 mm wafers, §The Corial 700, a very large area reactive ion etcher (RIE) equipped with a cathode of maximum size of 700 X 650 mm.
EXPORT NETWORK UVM (N Europe) CORIAL USA TBS (CIS) JW Technology (Korea) ETF (Germany) Japan AVBA (Israel) ASET (China) APS Ltd (South-East-Asia India, Australia) Contracts signed To be set up Ubiquity (Taiwan)
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