Angstrom Advanced Inc Who we are Angstrom Advanced

Angstrom Advanced Inc. Who we are: Angstrom Advanced is the leading supplier for ellipsometers. We offer full range of ellipsometers for thin film thickness measurement and optical characterization for refractive index and extinction coefficient (n & k). The Angstrom Advanced ellipsometer family includes discrete wavelength ellipsometers (single wavelength ellipsometers and multi-wavelength ellipsometers), deep UV, VIS, NIR and IR spectroscopic ellipsometers. Our ellipsometers have been delivered to many renowned universities, research institutes and companies worldwide. Angstrom Advanced's goal is to supply the most accurate and repeatable ellipsometers with the highest standard of customer satisfaction. Many upgrade accessories are available for different applications. What we do: ØPHE 101 Discrete Wavelength Laser Ellipsometer ØPHE 101 Multi-Wavelength Ellipsometer ØPHE 102 UV/VIS NIR Spectroscopic Ellipsometer ØPHE 103 UV/VIS NIR Spectroscopic Ellipsometer ØPHE 104 Infrared Spectroscopic Ellipsometer Angstrom Advanced Inc is one of the largest suppliers for ellipsometers in the world and we have the widest range of ellipsometers in the globe. We offers the ellipsometers, after-sales service, training and contract laboratory testing services. Angstrom Advanced Inc. . – 1056 Washington St. , Canton, MA 02021 Tel. : 617 -202 -3880 Fax : 617 -202 -3878 Email: sales@Angstrom. Advanced. com

1．PHE-101 Discrete Wavelength Ellipsometer Parameters： Ø Light Source: He-Ne Ø Wavelength: 632. 8 nm Ø Accuracy of film thickness: 0. 005 nm Ø Accuracy of Refractive index: 0. 001 Ø Measurement speed: Less 1 second Ø Incident angle： 20 to 90 ，5 /Step Ø Thickness range： 0 -6, 000 nm Functions/Features： Ø Thin film’s thickness, refractive index and Ø Full material library; Ø Data and graph output function; Ø Based on windows XP operation system; extinction coefficient, single or Multi-layer; Ø Integrated data acquisition, analysis software; Ø Sample size up to 300 mm; convenient and accuracy; Ø Second laser is used to make alignment most Ø wide applications, such as dielectrics, Economical cost. semiconductors, metal, organics and more; Angstrom Advanced Inc. . – 1056 Washington St. , Canton, MA 02021 Tel. : 617 -202 -3880 Fax : 617 -202 -3878 Email: sales@Angstrom. Advanced. com

2．PHE-101 Multi-Wavelength Ellipsometer Parameters： Ø Light Source：He-Ne and semiconductor Lasers Ø Wavelength: 532, 632. 8, 1064 nm, … Ø Accuracy of film thickness: 0. 005 nm Ø Accuracy of refractive index: 0. 0005 Ø Incident angle： 20 to 90 ，5 /Step Ø Repeatability： Psi= 0. 01 ，Delta= 0. 02 Ø Thickness range: 0 -10, 000 nm Functions/Features: Ø Integrated data acquisition, analysis software ； Ø Thin film’s thickness, refractive index and extinction coefficient, single layer or multi-layer; Ø Second Laser is used to make alignment most convenient and accuracy; Ø Full material library, generate Psi and Delta with any sample structures; Ø Simulate experimental data and give fitting parameter values, confidence and correlation matrix; Ø Full Cauchy, EMA, Lorenz et. al. dispersion formula and a lot of database; Ø User can build own dispersion formula and database; Ø Data and graph output function. Angstrom Advanced Inc. . – 1056 Washington St. , Canton, MA 02021 Tel. : 617 -202 -3880 Fax : 617 -202 -3878 Email: sales@Angstrom. Advanced. com

3．PHE-102 UV/VIS NIR Spectroscopic Ellipsometer Parameters： Ø Wavelength: 250 -1100 nm(190 -1100 nm), 250 -1700 nm(250 -2300 nm); Ø Incident angle： 20 to 90 ，5 /Step; Ø Repeatability： Psi= 0. 01 ，Delta= 0. 02 ; Ø Thickness range 0 -30, 000 nm Functions/Features： Ø Film’s thickness, refractive index and extinction coefficient, single or multi-layer; Ø Powerful software with full materials library, Full Cauchy, EMA, Lorenz et. al. dispersion formula and a lot of database; Ø Transmittance and reflectance Ø Automated angle of incidence 20 - 90 (optional), Wafer Mapping & Motorized X-Y Sample stage, 3 D graph display (optional); Angstrom Advanced Inc. . – 1056 Washington St. , Canton, MA 02021 Tel. : 617 -202 -3880 Fax : 617 -202 -3878 Email: sales@Angstrom. Advanced. com

4．PHE-103 UV/VIS, NIR Spectroscopic Ellipsometer Parameters： Ø Wavelength: 250 -1100 nm(190 -1100 nm), 250 -1700 nm (250 - 2300 nm); Ø Incident angle： 20 to 90 ，automated 0. 01 /Step; Ø Repeatability： Psi= 0. 01 ，Delta= 0. 02 ; Ø Vertical Sample stage Functions/Features： Ø Film’s thickness, refractive index and extinction coefficient, single or multi-layer; Ø Powerful software with full materials library, Full Cauchy, EMA, Lorenz et. al. dispersion formula and a lot of database; Ø Transmittance and reflectance; Ø Automated angle of incidence 20 -20 - 90 (optional), Wafer Mapping & Motorized X-Y Sample stage, 3 D graph display (optional); Angstrom Advanced Inc. . – 1056 Washington St. , Canton, MA 02021 Tel. : 617 -202 -3880 Fax : 617 -202 -3878 Email: sales@Angstrom. Advanced. com

5．PHE-104 Infrared Spectroscopic Ellipsometer Parameters： Ø Wavelength: 4000 -400 cm-1(2. 5 -25 um) Ø Beam size: 1 X 34 mm Ø Automated incident angle： 35 to 90 ， 0. 01 /Step Functions/Features： Ø Film’s thickness, N & K measurement; Ø Resistivity measurements and doping profiles; Ø Identification of chemical bonds and buried layers investigation ; Ø Transmittance and reflectance; Angstrom Advanced Inc. . – 1056 Washington St. , Canton, MA 02021 Tel. : 617 -202 -3880 Fax : 617 -202 -3878 Email: sales@Angstrom. Advanced. com