Air Liquide Gas System Equipment TM E L

Air Liquide Gas System Equipment TM E L E C T R O N I C S

Air Liquide Profile Air Liquide Worldwide • Established 1902 • Employs over 29, 000 in more than 60 countries • Field: bulk gas and related products Air Liquide America • Established 1969 • Employs over 3000 • Field: bulk gas and related products Air Liquide Electronics • Established 1991 • Employs approximately 500 • Field: semiconductor gases, chemicals, equipment and services: full, turn-key operation Air Liquide Equipment Manufacturing Center A ir Liquide’s legacy includes being number one in sales of industrial gases, including oxygen, nitrogen, hydrogen and many other gases to such varied industries as iron & steel, refining, chemicals, glass, electronics, paper pulp, metallurgy, food-processing, healthcare and aerospace. Air Liquide also develops a wide variety of services that range from managing gasrelated operations at customer sites and finding new energy solutions for manufacturers, to providing healthcare services for treating patients in the home. By combining new technologies and services, Air Liquide develops gas solutions that improve industrial performance and help protect the environment. The tradition of innovation goes back to the creation of the Air Liquide Group in 1902, when company founder, Georges Claude, developed the first commercially viable process for liquefaction of the gases found in air. That set in motion a series of innovations that led to the creation of the industrial gas industry. Over the years, Air Liquide has recorded a long list of firsts from the first full-scale production facility for liquid oxygen to the design and construction of the world’s most extensive industrial gas pipeline networks. By working closely with customers in their facilities, we develop solutions tailored to their needs. “At Air Liquide, we go beyond simply selling molecules of gases. We believe in learning our customers’ businesses to provide them with true value…” Patrick Verschelde, Air Liquide America President and Chief Executive Officer. Customers • Established 1989 • Field: gas and chemical semiconductor equipment manufacturing Employees TM E L E C T R O N I C S Shareholders Air Liquide America uses a triangle to illustrate the relationship between our customers, employees and shareholders. We strive to maintain balance by meeting the needs of each group.

Air Liquide Vision The preferred partner through creative solutions Mission ·We are a customer-driven organization, providing creative solutions through differentiated products and services in select markets. ·We conduct business based on a foundation of operational efficiency. ·We are focused on generating profitable growth and improving the satisfaction of our customers, employees and shareholders. ·We conduct every aspect of our business guided by our values. The Equipment Manufacturing Center started as American Specialty Gas Technologies (ASGT), founded by American Welding Supply in 1981. They produced their first pneumatically-driven gas manifold in 1985. Liquid Air Corporation acquired ASGT in 1989, then integrated the group within the company in 1992. Liquid Air then changed their name to Air Liquide America in 1994, and in turn, changed ASGT’s name to the Equipment Technology Group (ETG). As of 1998, ETG acquired Air Liquide’s chemical equipment manufacturing group, and in 1999, ETG became EMC, the Equipment Manufacturing Center. The Equipment Manufacturing Center is primarily focused on providing the electronics and semiconductor industries with leading-edge equipment and technology for gas delivery systems and services. Air Liquide Locations

Source PLC System Features • Process Monitoring Mode for constant monitoring of internal and external alarm inputs • Automatic Purge Mode to provide safe, complete purge with minimal operator input and risk (optional) • Serial or ethernet network to allow communication with other controllers • 12 -gauge steel cabinet construction finished with 2 -part, high-solids, polyurethane paint in a medium-textured finish Controller Features • Graphical interface to guide the operator through all the operations of the gas system • User programmable configuration functions and purge variables • PLC software that allows automatic temperature control for energy input to the cylinder • Automatic switching feature when delivery pressure is not met • Manual Override Mode for use under special circumstances--function testing or trouble shooting • Color-coded system status lights Panel Features • Modular and flexible design to allow for multiple panel and line configurations • Optional patented dual block assembly isolates the process gas pigtail and components during purging and reduces the purge volume to less than 2 cc • Automated Test Access Port for highintegrity inboard/outboard leak testing • 10 Ra VAR 316 L Stainless Steel on all wetted process gas components and piping • Laboratory-tested, field-proven components to provide optimal performance TM E L E C T R O N I C S T he Micro. Purge® P series controller is a powerful monitor and control system based on state of the art Programmable Logic Controller (PLC) technology. The P series dual controller is a fully stand alone process gas controller and is designed to monitor and control two autoswitching process gas panels. The Micro. Purge® P series controller is intended for use in semiconductor production environments where uninterrupted process gas supply is critical for FAB performance. Major controller components are supplied by premier industrial control manufacturers for superior uptime, support and parts availability. The modular design of the P series controller allows expansion and configuration flexibility to meet changing user requirements. The P series scans sensor equipped gas panels for various analog and digital alarm conditions. It also provides several external alarm inputs which are user configurable as warning or shut down. The P series clearly displays the status of process gas panel variables such as cylinder pressure or weight, panel delivery pressure and user configurable inputs such as excess flow, low cylinder pressure and toxic gas alarms. The analog and digital inputs to the system are user configurable as warning or shutdown. The P series accommodates options such as Automatic Cylinder Valves (ACV) and cylinder connection safety devices.

Typical Automatic Source Manifold TM E L E C T R O N I C S Applications: The P series provides uninterrupted process gas supply by continuously monitoring multiple alarm inputs, automatic purging of process gas panels and lines, automatic source gas switching and communication with factory automation software packages. Usability: ¨ Simplified operator interface for at a glance system status. ¨ When an alarm occurs during purge, PLC provides likely causes and solutions. ¨ Initialization screen prompts user with a check list to confirm cabinet and controller are facilitated correctly. ¨ Any observer may see the dynamic schematic diagram by simply touching the “panel detail” button on the interface. ¨ Automatically counts the number of cycles of up to 12 valves per panel and maintains the data for reporting, periodic maintenance, alarms, etc. ¨ Alphanumeric editing capability to customize the user interface to reflect user specific information (tool, destination, gas names, etc. ) Specifications Source PLC System

AVP System TM System Features • Process Monitoring Mode for constant monitoring of internal and external alarm inputs • Temperature Control • Bottom heater for smooth vaporization, higher flow rates and elimination of liquid droplets in the gas delivered • Super heater to remove droplets in the head space • Serial or ethernet network to allow communication with other controllers • 12 -gauge steel cabinet construction Controller Features • Graphical interface to guide the operator through all the operations of the gas system • User programmable configuration functions and purge variables • PLC software that allows automatic temperature control for energy input to the cylinder • Automatic switching feature when delivery pressure is not met • Manual Override Mode for use under special circumstances--function testing or trouble shooting • Color-coded system status lights Panel Features • Modular and flexible design to allow for multiple panel and line configurations • Automated Test Access Port for highintegrity inboard/outboard leak testing • 10 Ra VAR 316 L Stainless Steel on all wetted process gas components and piping • Laboratory-tested, field-proven components to provide optimal performance • Orbital butt-welded process fittings • Normally closed pneumatic valves for failsafe operation TM E L E C T R O N I C S T he Micro. Purge® All Vapor Phase (AVP) system is designed for liquid phase Hazardous Process Materials (HPM) process gases that require continuous monitoring and automatic vacuum assisted purging. The AVP system utilizes a patented process for maintaining vapor pressure during vapor extraction and limits the distribution of moisture droplets formed by rapid liquid boiling. The AVP is based on Air Liquide's world class, PLC-based Autoswitching Manifold System (AMS) System. Micro. Purge® P Series controllers, combined with well-proven, transducer-based manifolds, provide the vapor control as well as the gas system safety features optimized for submicron semiconductor manufacturing. When used in conjunction with a Micro. Purge Liquid Phase P Series Automatic Distribution System, the AVP provides safe, fault-tolerant specialty gas supply with low-cost-of-ownership characteristics.

Typical Automatic Source Manifold TM E L E C T R O N I C S The AVP gas cabinet delivers All Vapor Phase gas to offer: ¨ Consistent product purity (a major source of impurities exists in the liquid phase) ¨ Reliable gas delivery, accomplished through: • Reduced component corrosion (droplets would enhance corrosion) • Elimination of pressure and flow fluctuation (no liquid droplets are distributed with the gas) ¨ Increased Usable flow rates (economic benefits) The AVP system works with the Standard gas cabinet with the addition of three features: ¨ Superheater, for the purpose of preventing distribution of liquid droplets that normally exist in the head space of a cylinder. ¨ A bottom heater that provides for smooth boiling for vaporization of liquid, thus eliminating droplet production and maintaining cylinder pressure. ¨ PLC for on demand energy input to the cylinder. Specifications AVPTM System

Valve Manifold Box Systems (VMBs) System Features • Process Monitoring Mode for constant monitoring of internal and external alarm inputs • Automatic Purge Mode to provide safe, complete purge with minimal operator input and risk • Serial or ethernet network to allow communication with other controllers • 12 -gauge steel cabinet construction finished with 2 -part, high-solids, polyurethane paint in a medium-textured finish Controller Features • Graphical interface to guide the operator through all the operations of the gas system • User programmable configuration functions • Panel alarms with selectable time delay and some as either warning or shut down • Manual Override Mode for use under special circumstances--function testing or trouble shooting • Color-coded system status lights Panel Features • Modular and flexible design to allow for multiple panel and line configurations • Dual valve isolation provides for safe stick maintenance while adjacent sticks are online. • Modular panel design allows ganging of panels (up to 2 lines in; up to 8 lines out) • Line configuration options: ¨ Regulator ¨ Filter ¨ Excess Flow Sensor ¨ Purifier • Automated Test Access Port for highintegrity inboard/outboard leak testing TM E L E C T R O N I C S T he Micro. Purge® Automatic Distribution System (ADS) is designed for multiplexing HPM process gases which require continuous monitoring and automatic vacuum assisted purging. The semiconductor industry has embraced the concept of automated distribution as a safe, dependable and cost effective means of specialty gas supply. The ADS system consists of Air Liquide’s world class PLC based Micro. Purge® P series controllers combined with well proven transducer based distribution manifolds optimized for submicron semiconductor manufacturing. When used in conjunction with a Micro. Purge® P series auto-switching source manifold system, the ADS provides safe, fault tolerant specialty gas distribution with low cost of ownership characteristics. ADS systems are available in (inlet x outlet) 1 x 4, 2 x 4, 1 x 6, 2 x 6, 1 x 8, and 2 x 8 configurations. On 2 X systems, the inlet line maybe auto-switched or used as a spare.

TM E L E C T R O N I C S Typical Automatic Distribution Manifold Applications: The ADS system is designed for specialty gas distribution in submicron, high-production environments with emphasis on uptime and process gas purity with reduced cost of ownership. The ADS can provide monitoring and automatic distribution of up to eight process gas lines. When combined with Micro. Purge® P series autoswitching source manifold systems, ADS systems provide the uninterrupted process gas supply crucial to keeping capital equipment continuously productive. The Micro. Purge® P series controller provides continuous monitoring of multiple alarm inputs, performs automatic purging of process gas equipment and lines while communicating with factory automation software packages. Specifications Enclosure Dimensions 25 x 38 x 14 40 x 38 x 14 (4 -stick) (8 -stick) Exhaust Duct Size 4" 6" (4 -stick) (8 -stick) Air Flow Requirements 210 ft/3 min (4 -stick) 450 ft/3 min (8 -stick) CONTROLLER Interface 10”, 640 X 480 LCD touch screen display (TSD) PANEL (standard) Component Internal Surface Finish 10 Ra Termination Fittings VCR™ type Pneumatic Supply 85 psig regulated house N Venturi Supply 85 psig regulated house nitrogen Available (inlet x outlet) configurations 1 x 4, 2 x 4, 1 x 6, 2 x 6, 1 x 8, and 2 x 8 System configuration options Dual valve isolation, modular panel design, test access port Line configuration options Regulator, filter, excess flow sensor and purifier Valve Manifold Systems 2 or CDA (N 2 reqd for Z purge)

Semi-automatic Rackmount System Features • Semi-automatic purge mode to guide the operator step-by-step through the purge routine via the Operator Interface Terminal (OIT) • Serial or ethernet network to allow communication with other controllers • 12 -gauge steel rack constructed from Unistrut P 1000 Channel—Air Liquide Design Controller Features • Four-line LCD screen display for dynamic, real-time, pressure and weight display • Simplified text-based operator interface for at-a-glance system status • Interface to guide the user through all the operations of the gas system • System digital alarms with selectable time delay and some as either warning or shutdown • Manual over ride mode for use under special circumstances —function testing or trouble shooting Panel Features • Designed for non-hazardous process gas applications that require automated vacuumassisted purging • Modular VCR available to minimize total internal volume while maximizing leak integrity • 100% swept internal process gas volume eliminates the use of bourdon tube pressure gauges and all dead space volumes • 10 Ra VAR 316 L on all wetted process gas components and piping TM E L E C T R O N I C S T he Micro. Purge® P series controller is a powerful monitor and control system based on state of the art Programmable Logic Controller (PLC) technology. The P series dual controller is a fully stand-alone process gas controller (requires no portable device) and is designed to monitor and control two autoswitching semiautomatic process gas panels. The Micro. Purge® P series controller is intended for use in semiconductor production environments where uninterrupted process gas supply is critical for FAB performance. Major controller components are supplied by premier industrial control manufacturers for superior uptime, support and parts availability. The modular design of the P series controller allows expansion and configuration flexibility to meet changing user requirements. The controller scans sensorequipped gas panels for various analog and digital alarm conditions. The controller easily accommodates options such as Automatic Cylinder Valves (ACV).

Typical Automatic Source Manifold TM E L E C T R O N I C S Applications: The P series provides uninterrupted process gas supply by continuously monitoring multiple alarm inputs, automatic purging of process gas panels and lines, automatic source gas switching and communication with factory automation software packages. Usability: ¨ Intuitive and highly consistent screen format layouts for easy recognition ¨ When an alarm occurs during purge, PLC provides likely causes and solutions ¨ Automatically counts the number of cycles of up to 12 valves per panel and maintains the data for reporting, periodic maintenance, alarms, etc. ¨ Alphanumeric editing capability to customize the user interface to reflect user specific information (tool, destination, gas names, etc. ) Specifications Semi-automatic Rackmount

Standard and Poor’s Rating Standard and Poor’s has given Air Liquide a long-term AA- rating, and speaks highly of Air Liquide’s strength, leading position in the industrial gas business and growth and predictability of its cash flow. An obligor rated 'AA' has very strong capacity to meet its financial commitments. It differs from the highest rated obligors only in small degree. Standard & Poor's Ratings Service is the world's leading provider of timely, objective credit analysis and information. They have been rating conventional-term debt and general-obligation corporate and municipal bonds since 1916. Air Liquide’s Equipment Manufacturing Center, Fremont, California Code Compliance The Equipment Manufacturing Center of Air Liquide realizes the importance to its customers of conforming to applicable safety codes. EMC engineers keep current with local, state and federal regulations and have referenced the following codes in the design and build of gas delivery equipment: American National Standards Institute American Standard for Testing Machinery Compressed Gas Association Standard National Electric Code National Fire Protection Association SEMI International Standards Uniform Building Code Uniform Fire Code More on Air Liquide