從奈米科技談到物理發展李定國中央研究院物理所中華民國九

從奈米科技談到物理發展李定國中央研究院物理所中華民國九十四年四月二十一日國立成功大學，國家理論科學研究中

Outline • Global and Taiwan’s effort on Nanoscience and Nanotechnology • Is it a fad? • What is the role of physics ? – some observation

奈米國家型科技計畫 • 行政院國家科學委員會並於民國九十一年六月通過六年期的奈米國家型科技計畫。 • 此計畫冀盼藉由整合產學研力量，建立我國發展學術卓越和相關應用產業所需之平台技術，同時加速培育奈米科技所需人才，奠定我國奈米科技厚實基礎。 • 九十一年九月成立【奈米國家型科技計畫】辦公室，九十二年一月計畫開始，總經費 212億，由前任計畫總主持人現任國科會主委吳茂昆、及前研院副院長楊日昌推動執行。 • 九十三年六月國家科學委員會任命中央研究院物理所特聘研究員李定國，及研院副院長徐爵民擔任計畫總主持人。

National Program on Science and Technology The National Conference on Science and Technology (held once every four-year) determines the scopes and topics of the National Research Programs. A National Research Program has the highest priority in competing for national R & D funding. A National Research Program is an integration of all the research efforts from different ministries that involve research activities. A managing team consists of members from academics, industrial research institutes and industries is responsible for the execution of the National Research Program.

奈米國家型科技計畫各部會執行計畫學術卓越國科會自然處衛生署學術卓越計畫奈米醫學科技研究計畫經濟部技術處經濟部業局奈米國家型科技計畫產業化技術奈米產業化技術計畫奈米技術產業化推動計畫經濟部能源會奈米節能技術研究四年計畫原子能委員會環保署核能技術在奈米科技之發展與應用計畫奈米技術於環保領域之應用計畫勞委會國科會自然處人才培育學術重點設備計畫經濟部技術處產業核心設施計畫經濟部標檢局核心設施建置與分享運用 FY 95新加入奈米技術計量標準計畫教育部顧問室奈米科技人才培育計畫

奈米國家型科技計畫規劃經費單位：仟元 FY 93 （仟元） FY 94 （仟元） FY 95 （仟元） FY 96 （仟元） FY 97 （仟元）決算數部會 FY 92 （仟元）決算數預算數規劃數規劃數總計經濟部技術處 1, 855, 456 2, 150, 164 1, 722, 317 1, 980, 665 2, 830, 000 3, 028, 000 經濟部業局 19, 400 24, 140 37, 620 43, 263 120, 000 144, 000 經濟部能源局 26, 523 36, 445 38, 000 40, 000 經濟部標檢局 30, 794 32, 296 37, 226 42, 810 62, 445 72, 082 國科會自然處 641, 882 644, 027 690, 000 793500 727, 536 437, 050 教育部顧問室 21, 895 50, 000 68, 951 79294 80, 000 原子能委員會 19, 308 31, 386 70, 951 81594 99, 000 環保署 5, 660 7, 200 10, 100 18, 000 46, 960 衛生署 0 45, 000 63, 000 72450 100, 800 120, 960 419, 760 勞委會 0 0 0 15, 000 19, 000 23, 000 57, 000 14, 220, 937 445, 160 220, 968 288, 781 4, 118, 030 380, 846 409, 645

各分項計畫六年投入經費比例六年投入經費約 200億 6. 6% (學術 ), 10. 4%(產業 )

各部會六年投入經費

(一 )學術卓越計畫領域 1. 奈米結構物理、化學與生物特性之基礎研究 2. 奈米尺度探測與操控技術之研發 100 Å 3. 特定功能奈米元件、連線、介面與系統之設計與製造 4. 微/奈米尖端機械與微機電技術發展 5. 奈米生物技術 1 μm 6. 奈米材料之合成、組裝與製程研究 1μm

學術卓越暨核心設施計畫申請計表學術卓越數構想書提送件 FY 92 FY 93 FY 94 /通過件數統通過提出具體計畫書件數 FY 92 FY 93 FY 94 具體計畫書通過件數 FY 92 FY 93 奈米物理 22件 18件 12 件 6件 6件 8件奈米化學與材料 34件 24件 18件 16 件 12 件 11件 6件 6件奈米生技 42件 19件 21件 10 件 12 件 9件 5件 8件奈米機電 36件 5件 12件 9件 3件 3件 4件 3件 134件 66件 63件合計 47 件 39 件 29件 (35%) (59%) (46% ) 21 件 25 件 (16%) (38%) 核心設施合計 25件 3件 5件 9件 2件 1件 (36%) (67%) (20%) 5件 2件 (20%) (67%)

學術卓越通過計畫所屬研究領域分類 *92年通過計畫 21件； 93年通過計畫 25件統計計畫所屬之研究領域 92 93 年年計畫所屬之研究領域 92 年 93 年 6 9 3 2 1 2 0 0 2 3 3 5 0 0 2 5 3 3 5 3 2 4 2 6 4. 特定功能奈米元件、連線、介面與系統之設計與製造 1. 奈米結構物理、化學與生物特性之基礎研究 Ø介觀物理與化學 9 7 Ø 奈米結構特性之理論計算、模擬與預測 7 11 Ø孔洞及高表面積材料：中孔洞材料 3 3 Ø燃料電池及相關基礎研究 2 0 Ø量子點材料及光譜研究 5 6 Ø光晶體材料及性質 2 1 Ø高透明度有機／無機複合材料 1 1 Ø奈米粉粒材料的應用開發 5 11 Ø奈米結構材料研究 9 13 2. 奈米材料之合成、組裝與製程研究 3. 奈米尺度探測與操控技術之研發 Ø奈米圖案成形 (Nano-patterning)技術 6 7 ØSPM基礎研究 5 3 Ø奈米結構增強之光電元件 Ø磁電子 (Spintronics)元件及特性 Ø近場光學奈米儲存技術 5. 微 /奈米尖端機械與微機電技術發展 Ø近場光學奈米微影 Ø微機械定位及組裝 Ø微感測器 Ø微流體研究 Ø軟蝕刻技術 6. 奈米生物技術 Ø生物奈米感測元件與蛋白質晶片 Ø細胞與奈米材料交互作用 Ø生物分子的奈米操控 Ø 生物組織與細胞的奈米操控，觀察及量測 Ø奈米粒子於藥物輸送與生物檢測應用

(1)學術卓越 • Porous and high surface area materials: Mesoporous materials • Application of nanomaterials for energy and the related fundamental research • Studies on quantum dot materials and spectrum • Photonic crystal materials • Highly transparent organic/inorganic composites • Applications of nano-particle materials • Fundamental studies in nanostructured materials Nanomaterials • Nanopatterning technologies • Fundamental research on SPM • Near-field optical nanolithography • Soft lithography technology • Nanostructures strengthened optotronic devices • Spintronic devices • Near-field optical storage technologies • Microposition and microassembly • Microsensors • Microfluid Cross-discipline Integration Probes & Manipulation Techniques 25. 9%* Functional Nanodevices MEMS/NEMS Technology Mesoscopic physics and chemistry Basics Research 31. 7%* *FY 2004 budget allocation Nano. Biotechnology 25. 5%* 17. 0%* Theoretical modeling • Nanoscale bio-detectors and bio-chips • Interactions between biocells and nanomaterials • Self-assembly and manipulation of biomolecules • Manipulation, detection and measurement of bio-tissues, bio-cells and organelles at nanoscale • Application of nano particles for drug delivery • Application of nanomaterials for biomedical detection and biocompatible research

(二 )產業化技術計畫領域奈米電子顯示器資訊儲存通訊奈米構裝奈米生技傳統產業能源應用應用創新發揮奈米特性，結合產業專門知識奈米材料平台技術檢測分析 /設備開發核心設施建置資料來源：研院奈米中心理論模擬

(三 )核心設施建置計畫 1. 建立支援奈米研究之重點設備 2. 建立資源分配使用之網路系統 3. 資助創新之奈米相關具之設計 /製造

核心設施建置與分享運用分項計畫現況台大奈米科技中心－顯微技術與奈米分析中心的建構與管理 (台灣大學凝態科學研究中心 ) N T H U 台灣聯合大學系統 —奈米微影暨奈米生技核心設施 (清華大學奈米科技研究中心 ) 台灣聯合大學系統奈米製作暨分析核心設施中心 (交通大學電子程學系中台灣奈米技術科學與程核心設施 (中正、中興、彰師大、雲科大 ) 奈米科學尖端研究設施之建構 (中研院 ) 奈米共同實驗室 ( 研院 ) 東部奈米科技研究中心 (東華大學 ) ) 南台灣奈米科技研究中心核心設施建置 (成功大學 ) 高屏地區奈米共用實驗室 (中山大學奈米中心 )

(四)人才培育計畫 K-12 Project u Establish study meetings on Nanotechnology for teachers u Develop K-12 electronic newsletter on Nanotechnology u Hold Nanotechnology lectures which are open to the public u Establish an internal information exchange website for K-12 Nanotechnology Committee http: //k 12. nbm. ntu. edu. tw u Develop five regional K-12 personnel incubation centers Regional Nanotechnology Personnel Development Center Project u Establish five regional nanotechnology personnel development centers - Full spectrum personnel incubation courses, focus on universities and post-graduate programs - Assist Industrial Nanotechnology personnel needs through on-the-job training (OJT) - Help K-12 Project - Book publications Nanotechnology Talent Bank Establishment & Support http: //nano-expert. ntu. edu. tw/

New nanotech teaching materials - Nana and Nono

Popular science books were produced by seed teachers to introduce nanotechnology to high-school students as well as the general public. Nano-Chemistry Nano-Biology Nano-Physics

國際上對奈米科技之投入單位：百萬美元資料來源 : 研院奈米中心彙整 (Mar.

Global Statistics • Global market for nanotechnology products in 2015: $1 trillion* • Global workforce in nanotechnology industries (includes U. S. ) in 2018: 2 million* • Estimated companies active in nanotechnology research (worldwide) in 2004: 900** • Global number of researchers working in nanotechnology (includes U. S. ) in 2003: 20, 000*** *Source: National Science Foundation **Source: Plunkett Research ***Source: National Nanotechnology Initiative

國際上 2005年之民間投資將超過政府 Activity shifts from basic research to applications development! 資料來源 : The Nanotech Report 2004 TM, Lux Research Inc.

Is this a fad? It all began with Clinton: Title: National Nanotechnology Initiative: Leading to the Next Industrial Revolution (NNI) THE WHITE HOUSE February 7, 2000 MEMBERS OF CONGRESS: I am pleased to forward with this letter National Nanotechnology Initiative: Leading to the Next Industrial Revolution, a report prepared by the Interagency Working Group on Nanoscience, Engineering and Technology (IWGN) of the National Science and Technology Council’s Committee on Technology. This report supplements the President’s FY 2001 budget request and highlights the nanotechnology funding mechanisms developed for this new initiative, as well as the funding allocations by each participating Federal agency. The President is making the National Nanotechnology Initiative (NNI) a top priority. ….

奈米科技的起源 1996 -1998年間 , 以美國 NSF為主要贊助者 , 由 World Technology Evaluation Center (WTEC)出面組織的委員對奈米尺度下之可能的科技作了仔細的評估結論是奈米科技極具潛力 , 發展它有可能有重要且影響廣泛的技術

物理學家很早就注意到奈米 … • 4 th Century, Roman glassmaker: the color of glasses can be changed by mixing in metal particles • 1883, Films containing silver halides for photography were invented by George Eastman, founder of Kodak • 1908, Gustay Mie first provided the explanation of the size dependence of color • 1950 -1960, small metal particles were investigated by physicists • 1957, Ralph Landauer realized the importance of quantum mechanics plays in devices with small scales • Before 1997 => mesoscopic (or low dimensional) physics: quantum dots, wells, wires…are known already NCTS started a mesoscopic physics program in 1998!

奈米與生物的尺度關係圖單一分子約 1 奈米紅血球 ~5 微米 DNA 蛋白質 ~ 奈米藻類 30 微米細菌 1 m 10 -10 10 -9 10 -8 10 -7 10 -6 米 10 -5 10 -4 10 -3 10 -2 電晶體線寬度 0. 12 微米半導體奈米粒子 (硒化鎘 ) 5 奈米奈米尺度之記憶元件 1012 位元 /cm 2 (1 Tbit/cm 2) IC 中的銅線寬度 ~ 0. 2 微米 IBM 筆記型電腦 750 TM 微處理器 7. 56 毫米 × 8. 799 毫米 6. 35× 106電晶體

Peter Silverman, Intel, July, 2001 Y. Borodovsky, Intel, April, 2002 in PMJ 2002

Generalizations of Moore’s Law Exponenti al trends in: Price per Transistor in MPU ($) 1 § More functions* per chip 10 § Increased performan ce 10 § Reduced energy per operation § Decreased 10 -2 -4 -6 Dollars to Microcents: Source: Data. Quest, Intel

到底會發生 ? ? 事預估以現行的半導體技術縮小的速度 , 在 2015左右 , device大小達 10 nm以下. 電子的波動性不可再被忽略… Refs. • Fowler, Physics Today Oct. 50 -54(1997) • Glattii, Nature 393, 516(1998)

跨領域最小單位逐漸重疊電機程生物奈米材料

Merging of frontiers of sciences and technology (1 nm to 100 nm) • Chemistry --- larger molecules • Material science --- clusters, wires, tubes are different from bulk • Physics --- low dimensional systems, soft materials, complex systems • Biology --- DNA, proteins, . . • Medical sciences --- custom specific and targeted drugs, measure smaller and smaller tumors, . . • Engineers --- MEMS to NEMS, the end of Moore’s laws and miniaturizing. . • Society demands --- less materials and energy consumption, less polution. . But not less functions

emerging of new tools: • STM, AFM , … • 3 rd, 4 th. . generation of synchrotron sources • HRTEM, STEM, . . • Finer and finer lithography • Higher and higher intensity lasers. .

What is the role of physics ? – some observation Physics: the study of natural or material world and phenomena; natural philosophy --- Yahoo dictionary Folklore: 20 th century is the century of physics. 21 st century is the century of life science. --- imply: physics will become less and less important, less funding, less opportunity?

From the development of Nano, several observation : • Physicists played pivotal roles in this field • Physics becomes even more important • Physicists must broaden its knowledge in other areas • Understanding soft matter and its interaction with hard matter becomes very important

Physics seems to be moving toward two opposite directions: 1. strings, cosmology, black holes, galaxies, etc. . --- more isolated from other disciplines and everyday life; --- impact of physics will become smaller and smaller , a pessimistic view 2. Condensed-matter, atomic and molecular, optical, plasma physics, biophysics, nano. . --- traditional boundaries between different physics sub areas and between physics and other disciplines are vanishing; --- physics becomes more important in other disciplines; all disciplines require deeper training in physics and help from physicists, an optimistic view 21 st century could be the end of biology as we now know it!

The future of physics – my own view • The merging of sciences is inevitable. • Just as before physics will be crucial in the development of new sciences. • Actually, physics and mathematics must be emphasized more in the undergraduate studies of all disciplines. • The graduate programs in physics should be carefully examined to meet the new challenges. • The future of physics is as bright as ever before!

Thank you for your attention!

奈米粒子靜電影印術連接 Bottom-Up及 Top-Down關鍵性奈米技術之方法國立清華大學物理系果尚志教授之計畫中已發展出一種利用靜電力顯微鏡之局部電荷注入法(空間解析度可達 30 nm)，可以在具有極長電荷儲存時間之駐電體表面上製作出任意形狀之帶電結構，並可利用此種奈米級靜電結構選擇性吸附奈米粒子(金屬及半導體的核殼式奈米粒子)

Gordon Moore made his famous observation in 1965, just four years after the first planar integrated circuit was discovered. The press called it "Moore's Law" and the name has stuck. In his original paper, Moore observed an exponential growth in the number of transistors per integrated circuit and predicted that this trend would continue. Through Intel's relentless technology advances, Moore's Law, the doubling of transistors every couple of years, has been maintained, and still holds true today. Intel expects that it will continue at least through the end of this decade. The mission of Intel's technology development team is to continue to break down barriers to Moore's Law. Ref : http: //www. intel. com/research/silicon/mooreslaw. htm

研究介紹目前，以膠體溶液法 (colloidal solution)製成之奈米粒子具有大小、形狀均勻及表面可功能化的特性，並擁有可大量生產之潛力，是現今奈米科技中之基盤材料及組成要件，本研究之主要目標是以靜電微影方式製成奈米級靜電圖案並在膠體溶液中完成奈米粒子之控制式自組裝（controlled self assembly），此種靜電力控制之奈米粒子自組裝方法類似於傳統之靜電影印技術（ xerography），但是空間之解析度可提高 3000倍以上（30奈米 v. s. 100微米）。

本項技術之特色 • 高解析度：以 5奈米之金奈米粒子組裝可達 30奈米之線寬） • 高寫入速度：靜電圖案之寫入速度可達每秒 4釐米 (4 mm/sec) • 可重覆抹寫 • 超長電荷儲存時間 • 可在液態環境中作 • 有大面積化潛力： scalable至公分級

Writing speed: 20µm/s Sample bias: 4. 0 V Area: 5µm 2 Writing speed: 20µm/s Sample bias: -4. 5 V Area: : 5µm 2

High Speed Writing: ~3. 8 mm/sec Bias: 10 -V-amplitude 20 k. Hz sine wave

Inject charge on surface Dip in QD solvent for ~ 10 s Remove residue solvent

應用領域 • 奈米電子學 (電子鼻、單電子電晶體陣列等) • 高控制性 (大小、位置、結構)奈米材料之成長 (nanoparticles, nanorods, nanowires) • 生醫檢測 (DNA、蛋白質、病毒生醫晶片 ) • 奈米粒子自組装技術之模板 (templates)

觀察、操控及量測記憶奈米分子在活體果蠅腦內的活動國立清華大學生技所江安世教授團隊 Ann-Shyn Chiang et al. Memory circuit. Curr. Biol. (2004) 14, 263 -272.

Alzheimer Flies Show Brain Neurodegeneration To improve life quality by enhancement of memory formation. Aβ 42/3 d Aβ 42/14 d Aβ 42/30 d Aβ 42/45 d To maintain normal brain function by preventing neurodegeneration or induction of neural regeneration. Aβ 42/45 d Ann-Shyn Chiang et al. Aβ 40/45 d PNAS (2004) 101, 6623 -6628.

臺大顯微技術與奈米分析中心 200 k. V FEI Tecnai F 20 掃描穿透式電子顯微鏡 (STEM) 尖端設備一流環境台大凝態科學中心陳正弦主任

200 k. V 掃描穿透式電子顯微鏡特性及功能 1. 超高解析掃描穿透電子顯微鏡解析度 (< 0. 20 nm ) 2. 原子數 (Z)-對比超高解析原子影像 3. 超高解析單色器電子能量損失能譜 (Electron Energy. Loss Spectroscopy -- EELS) 解析度 (< 0. 2 e. V ) 4. 勞倫茲磁性電子顯微術 (Lorentz Microscopy) 5. 電子全像術 (Electron Holography) 6. 電子三維影像建構術 (Electron Tomography) 7. X光能量散佈儀 (EDS) -- 化學成份分析 8. 試片控制溫度範圍 (20 K ~ 1300 K)

BN K-edge 電子能態結構原子數(Z)-對比超高解析原子影像 Sr. Ti. O 3 Ti Sr 電子能量損失能譜解析度 0. 14 e. V

(四 )人才培育計畫 1. 推動奈米科學與程技術等跨領域學程 2. 加強基礎科學教育（幼稚園至高中） 3. 促進國際合作與人員交流 4. 聘用海外人才 5. 促進學術與產業間之研發合作及人員交流

從奈米科技談到物理發展 李定國 中央研究院物理所 中 華 民 國 九

從奈米科技談到物理發展李定國中央研究院物理所中華民國九