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North America Information & Control Committee Liaison Report December 2011 NA I&C Report - North America Information & Control Committee Liaison Report December 2011 NA I&C Report - December 2011

Outline • • Leadership Organization Chart Meeting Information Ballot Results Upcoming Ballots Task Force Outline • • Leadership Organization Chart Meeting Information Ballot Results Upcoming Ballots Task Force Reports Upcoming Meeting Schedule NA I&C Report - December 2011

Task Force and Leadership Changes • Energy Saving Equipment Communication TF – New task Task Force and Leadership Changes • Energy Saving Equipment Communication TF – New task force – Thomas Huang and Gino Crispieri (ISMI) appointed as TF leaders • Data Quality TF – Task force disbanded • Diagnostic Data Acquisition (DDA) TF – Harvey Wohlend stepped down as TF co-leader – Gino Crispieri (ISMI) appointed as TF co-leader – Brian Rubow (Cimetrix) remains as TF co-leader NA I&C Report - December 2011

Leadership • Committee Co-chairs – David Bricker / Applied Materials – Jack Ghiselli / Leadership • Committee Co-chairs – David Bricker / Applied Materials – Jack Ghiselli / Ghiselli Consulting – Lance Rist / Rist. Tex • Technical Architect – Gino Crispieri / ISMI NA I&C Report - December 2011

Current Committee Structure Information & Control Committee AMHS IBSEM TF Sensor Bus TF Diagnostic Current Committee Structure Information & Control Committee AMHS IBSEM TF Sensor Bus TF Diagnostic Data Acquisition (DDA) TF Process Control Systems (PCS) Architecture TF ! New Energy Saving Equipment Communication TF GEM 300 TF NA I&C Report - December 2011 Sort Map TF

Meeting Information • Last meeting – October 26 for NA Fall 2011 Meetings San Meeting Information • Last meeting – October 26 for NA Fall 2011 Meetings San Jose, California • Next meeting – April 4 for NA Spring 2012 Meetings San Jose, California NA I&C Report - December 2011

Document Review Summary [1/4] Cycles 5 & 6 * Cycle 5 * Doc # Document Review Summary [1/4] Cycles 5 & 6 * Cycle 5 * Doc # Description TC Action 5102 A Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges to SEMI E 54 -0710, Sensor/Actuator Network Standard Note: Copyrighted material identified as technically justified. Copyright release will be requested. Superclean 5179 A (1 LI) Revision to SEMI E 90. 1 -0706, Provisional Specification for SECS-II Protocol Substrate Tracking 1: Passed as balloted NA I&C Report - December 2011

Document Review Summary [2/4] Cycles 5 & 6 * Cycle 6 * Doc # Document Review Summary [2/4] Cycles 5 & 6 * Cycle 6 * Doc # Description TC Action 4828 (1 LI) Revision to SEMI E 133 -1110, Specification for Automated Process Control Systems Interface. Line item changes to E 133 to provide a virtual metrology capability 1: Passed as balloted 5002 A New Standard: Specification for EDA Common Metadata Failed, reballot 5181 Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Communications for CC-Link IE Field Network to SEMI E 54 -0710, Sensor/Actuator Network Standard Note: Use of CC-Link IE was assessed as potentially material and technically justified. This is similar to other E 54 subordinate standards. LOA will be requested from IP holder. Superclean NA I&C Report - December 2011

Document Review Summary [3/4] Cycles 5 & 6 * Cycle 6 * Doc # Document Review Summary [3/4] Cycles 5 & 6 * Cycle 6 * Doc # Description TC Action 5273 (8 LIs) Revisions to: • SEMI E 40 -0709, Standard for Processing Management • SEMI E 40. 1 -1106, SECS-II Support for Processing Management Standard • SEMI E 87 -0709, Specification for Carrier Management (CMS) • SEMI E 90 -0707, Specification for Substrate Tracking • SEMI E 94 -0309, Specification for Control Job Management, • SEMI E 94. 1 -1107, Specification for SECS-II Protocol for Control Job Management (CJM) To remove References to Inactive Standards and Defects in the GEM 300 Standards 1: Superclean 2: Superclean 3: Superclean 4: Superclean 5: Superclean 6: Superclean 7: Superclean 8: Superclean NA I&C Report - December 2011

Document Review Summary [4/4] Cycles 5 & 6 * Cycle 6 * Doc # Document Review Summary [4/4] Cycles 5 & 6 * Cycle 6 * Doc # Description TC Action 5316 Reapproval for SEMI E 4 -0699 (Reapproved 0307), SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) Passed as balloted 5317 Reapproval for SEMI E 95 -1101 (Reapproved 0307), Specification for Human Interface for Semiconductor Manufacturing Equipment Note: E 95 allowed by NA I&C to go into Inactive status Failed, discontinued 5318 Reapprovals for SEMI E 116 -0707 E, Specification for Equipment Performance Tracking and SEMI E 116. 1 -0707, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT) Failed, discontinued NA I&C Report - December 2011

Technical Ballots to be reviewed at NA Standards Spring 2012 Meetings * Voting Period Technical Ballots to be reviewed at NA Standards Spring 2012 Meetings * Voting Period – Cycle 1 or 2 * Document # Document Title TF / SC 5002 B New Standard: Specification for EDA Common Metadata DDA TF 5177 A Revision to SEMI E 145, Classification for Measurement Unit Symbols in XML DDA TF New SEMI E 54 Subordinate Standard: Specification for Sensor/Actuator Network Specific Device Model for Generic Equipment add-on Sensor (ADDON) Sensor Bus TF 5274 NA I&C Report - December 2011

Task Force Updates • Energy Saving Equipment Communication TF – New task force – Task Force Updates • Energy Saving Equipment Communication TF – New task force – Charter • Develop and propose standards that specify communications between the factory system and production equipment to move the equipment between power saving modes as defined in S 23. – Scope • This TF will focus on communication protocol and message content for the purpose of reducing energy consumption on process equipment and supporting subsystems. . • The TF will collaborate with the EHS Committee to avoid conflict with definitions in S 23 NA I&C Report - December 2011

Task Force Updates [continued] • Data Quality TF – Task force disbanded • Diagnostic Task Force Updates [continued] • Data Quality TF – Task force disbanded • Diagnostic Data Acquisition (DDA) TF – TF leadership changes • Harvey Wohlwend stepped down as co-leader • Gino Crispieri appointed as new co-leader – New Standard: Specification for EDA Common Metadata (#5002 B) submitted for C 1 or C 2 -12 NA I&C Report - December 2011

Task Force Updates [continued] • GEM 300 TF – No new ballots or SNARFs Task Force Updates [continued] • GEM 300 TF – No new ballots or SNARFs originating from NA • Process Control Systems (PCS) TF – E 133. 1 revision (#4507 A Info) for fault detection enhancements to be issued as an informational ballot in conjunction with C 2 -12 NA I&C Report - December 2011

Task Force Updates [continued] • Sort Map TF – E 142. x revisions (#5104) Task Force Updates [continued] • Sort Map TF – E 142. x revisions (#5104) to be balloted for Cycle 4, 2012 • Sensor Bus TF – New E 54 subordinate standard for Generic Equipment add -on Sensor (ADDON) [#5274] to be balloted for C 1 or C 2 -12 NA I&C Report - December 2011

Other Discussions • Withdrawal of SNARF # 5319 (E 118 and E 118. 1 Other Discussions • Withdrawal of SNARF # 5319 (E 118 and E 118. 1 reapproval) – NA I&C approved the withdrawal of SNARF # 5319 since E 118 and E 118. 1 are the responsibility of the Japan I&C committee. Japan I&C agreed to perform the appropriate 5 -Year maintenance on E 118 and E 118. 1 • Withdrawal of SNARF # 5318 (E 116 and E 116. 1 reapproval) – NA I&C approved the withdrawal of SNARF # 5318 since Korea I&C plans to update E 116 NA I&C Report - December 2011

NA I&CC Spring 2012 Meeting Schedule [DRAFT] • Monday, April 2 – – I&C NA I&CC Spring 2012 Meeting Schedule [DRAFT] • Monday, April 2 – – I&C Leadership (11: 30 AM to 1: 00 PM) PCS (1: 00 PM to 3: 00 PM) GEM 300 (1: 00 PM to 5: 00 PM) I&C GCS (5: 00 PM to 6: 00 PM) • Tuesday, April 3 – – DDA (8: 00 AM to 3: 00 PM) Sensor Bus (1: 00 PM to 3: 00 PM) Sort Map (3: 00 PM to 5: 00 PM) Energy Saving Equip Comm (3: 00 PM to 6: 00 PM) • Wednesday, April 4 – I&C Committee (8: 00 AM to 4: 30 PM) NA I&C Report - December 2011 SEMI Headquarters San Jose, CA

NA Standards Spring 2012 Meetings • April 2 -5 • SEMI Headquarters in San NA Standards Spring 2012 Meetings • April 2 -5 • SEMI Headquarters in San Jose, California • Inviting local companies willing and able to host some of the meetings to maintain one-week format • Final schedule to be announced soon NA I&C Report - December 2011

NA Standards Spring 2012 Meetings April 2 -5 Sunday 1 Monday 2 Tuesday 3 NA Standards Spring 2012 Meetings April 2 -5 Sunday 1 Monday 2 Tuesday 3 Wednesday 4 Thursday 5 Friday 6 Saturday 7 EH&S NARSC Facilities & Gases Liquid Chemicals Information & Control MEMS/NEMS HB-LED Schedule -at-a-glance Metrics PV Materials Physical Interfaces & Carriers Silicon Wafer ATE 3 DS-IC NA I&C Report - December 2011 Traceability

NA Standards Staff Changes Paul Trio Sr. Manager, NA Standards Operations Kevin Nguyen Manager, NA Standards Staff Changes Paul Trio Sr. Manager, NA Standards Operations Kevin Nguyen Manager, NA Standards Committees Provisional: Contact Paul Trio ([email protected] org) or Kevin Nguyen ([email protected] org) Operations Committees: NARSC / I&C / ATE / MEMS / Microlithography, HB-LED / 3 DS-IC Meetings & Events Planning General Information STEPS/Workshops and Sponsorships Committees: Facilities / Gases / PV Automation / PV Materials / Silicon Wafer / Traceability Standards Website Committees: Compounds Semiconductor Materials / EHS / FPD / Liquid Chemicals / Metrics / PIC Hiring of new NA Standards staff has been completed. Official announcement by the end of the month. NA I&C Report - December 2011

Thank You! For more information or participate in any NA I&C activities, please contact Thank You! For more information or participate in any NA I&C activities, please contact Paul Trio at SEMI ([email protected] org) NA I&C Report - December 2011