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IEEE Robotics and Automation Society Technical Committee (TC) on Semiconductor Manufacturing Automation Technical Committee IEEE Robotics and Automation Society Technical Committee (TC) on Semiconductor Manufacturing Automation Technical Committee Meeting during the 2009 IEEE Conference on Automation Science and Engineering Venue: Room Chanakya B, The Lalit Ashok Bangalore, India Time: 3: 30 pm – 4: 00 pm, Monday, August 24, 2009 Prior to the Invited Session on Automation for Yield Symptom Identification in Semiconductor Manufacturing IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA

Meeting Overview • Review of TC facts – Face-to-face meetings – TC data on Meeting Overview • Review of TC facts – Face-to-face meetings – TC data on membership, etc. • TC activities – Publication involvement – Conference involvement • Discussion topics – Conferences ISSM & ASMC – Extend scope to “Semiconductor and Cleantech Manufacturing Automation” IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 2

Technical Committee (TC) Brief Data • URL: http: //xs 3 d. kaist. edu/TC-SMA • Technical Committee (TC) Brief Data • URL: http: //xs 3 d. kaist. edu/TC-SMA • Founding Date: August 1, 2001 • Scope: – To promote basic and applied research in semiconductor manufacturing and automation – To provide a forum for exchanging ideas among semiconductor manufacturing researchers and engineers – To facilitate related scientific publications and events (such as special conference sessions, workshops, symposia, and special journal issues) IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 3

Face-to-Face TC Meetings • • Sept. 25, 2006, Tokyo (during IEEE/SEMI Int’l Symposium on Face-to-Face TC Meetings • • Sept. 25, 2006, Tokyo (during IEEE/SEMI Int’l Symposium on Semiconductor Manufacturing) Oct. 9, 2006, Shanghai (during IEEE/SEMI Int’l Conference on Automation Science and Engineering) April 2007, Roma (during IEEE Int’l Conference on Robotics and Automation) Sept. 2007, Scottsdale (during IEEE Conference on Automation Science and Engineering) August 2008, Washington DC (during IEEE Conference on Automation Science and Engineering) October 2008, Tokyo (during International Symposium on Semiconductor Manufacturing) August 2009, Bangalore, India (during IEEE Conference on Automation Science and Engineering) IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 4

Most Recent TC Meeting (during IEEE CASE 2009) First Row (from left): Gentleman #1, Most Recent TC Meeting (during IEEE CASE 2009) First Row (from left): Gentleman #1, Prof. Jingshan Li (U Kentucky) , Prof. Fan-Tien Cheng (NCKU, Taiwan), Prof. James R. Morrison (KAIST), Prof. Min-Hsiung Hung (National Defense U, Taiwan), Prof. Shi-Chung Chang (National Taiwan U), Prof. Argon Chen (National Taiwan U), Prof. Chih-Min Fan Please send e-mail to james. [email protected] edu to identify yourself (we’ll update the photo caption). IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 5

Last TC Meeting (during ISSM 2008) First Row (from left): Gentleman #1, Gentleman #2, Last TC Meeting (during ISSM 2008) First Row (from left): Gentleman #1, Gentleman #2, Prof. James R. Morrison (KAIST), Mike Zhang (Sr. Manager, Spansion), Peter van der Meulen (Chairman and Founder, Blue Shift Technologies), Gentleman #3, Prof. Shi-Chung Chang (National Taiwan University) Please send e-mail to james. [email protected] edu to identify yourself (we’ll update the photo caption). IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 6

TC Meeting (during IEEE CASE 2008) IEEE RAS Technical Committee on Semiconductor Manufacturing Automation TC Meeting (during IEEE CASE 2008) IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 7

TC Meeting (during IEEE CASE 2007) Second Row (from left): Prof. Jiangshan Li (U TC Meeting (during IEEE CASE 2007) Second Row (from left): Prof. Jiangshan Li (U Kentucky), a gentleman coming late, Prof. Oliver Rose (Dresden U Tech. , Germany), Prof. Leon Mc. Ginnis (Georgia Tech), Kan Wu (Georgia Tech), President van der Meulen (Blueshift), General Manager David Aires (Intel), Vice President John Behnke (Spansion), Lance Rist (ISMI/SEMATECH), Naiping Keng (Intel) First Row (from left): Deputy Director Chen-Fu Chien (TSMC, Taiwan), Mike Zhang (Spansion), Sr. Director Eric Englhardt (Applied Materials), Prof. Fan-Tien Cheng (NCKU, Taiwan) IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 8

Membership • 258 TC members • All the major institutes and companies across Americas, Membership • 258 TC members • All the major institutes and companies across Americas, Europe, and Asia • New member recruiting: – August 2008, GOLD (Graduates of the Last Decade) lunch – April 2007, GOLD (Graduates of the Last Decade) lunch • Nominations and Awards: – – Dev Pillai (Intel Fellow), T-ASE Advisory Board, 2007 Adar Kalir (Intel), T-ASE Associate Editor, 2007 Chen-Fu Chien (TSMC & Tsinghua U), T-ASE Associate Editor, 2007 Mike Tao Zhang, IEEE RAS Early Career Award in Robotics and Automation, 2008 – Meng-Chu Zhou, nominated for IEEE RAS Distinguished Lecturer, 2009 – Meng-Chu Zhou, selected as Sr. Editor of IEEE T-ASE, 2009 IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 9

Committee Board Honorary Chairs • • Dr. Simon Yang, Senior Vice President & Chief Committee Board Honorary Chairs • • Dr. Simon Yang, Senior Vice President & Chief Technology Officer, Chartered Semiconductor Manufacturing Co. Dr. Douglas Chen-Hua Yu, Senior Director, Advanced Module Technology Development Division, TSMC Mu. Der JENG , IEEE Fellow, Professor, Department of Electrical Engineering, National Taiwan Ocean University Meng. Chu ZHOU, IEEE Fellow, Professor, Dept of Electrical and Computer Eng, New Jersey Institute of Technology Co-Chairs • • • Thomas Wen-Yao CHEN, Director, Technology System Integration Division, TSMC Mike Tao ZHANG, COO Sensor Analytics, Inc & Executive Vice President, US-China Green Energy Council James R. Morrison, Assistant Professor, Dept of Industrial and Systems Engineering, KAIST, South Korea Academy Chair: Prof. Stanley B. Gershwin, Dept of Mechanical Engineering, MIT Industry Chair: Dave Gross, Director, Global Manufacturing Systems Technology, Advanced Micro Devices (AMD) Membership Chair: Dr. Chen-Fu Chien, Deputy Director, Industrial Eng. , TSMC Conference Chair: Prof. Shi-Chuang Chang, Dept of Electrical Engineering, National Taiwan University Publication Chair: Prof. Ruey-Shan Andy Guo, Chair, Dept of Business Administration, National Taiwan University Regional Chair, China: Prof. Han Ding, Cheung Kong Chair Professor and Director, Advanced Electronic Mfg Center, Shanghai Jiao Tong Univ. Regional Chair, Europe: Dr. Arieh Greenberg, Senior Principal, Qimonda Regional Chair, Israel: Dr. Adar Kalir, Staff Engineer, Intel Corporation Regional Chair, Japan: Kenji Miyake, Chief Technology Officer, GEN Inc. Regional Chair, Korea: Prof. Tae-Eog Lee, Dept of Industrial Eng, Korea Advanced Institute of Science and Technology Regional Chair, Taiwan: Prof. Shi-Chung Chang, Dept of Electrical Eng, National Taiwan University Regional Chair, U. S. A. : Prof. John W. Fowler, Dept of Industrial Engineering, Arizona State University IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 10

Publication Involvement • Special Issue on Automation Science and Engineering, IEEE Robotics and Automation Publication Involvement • Special Issue on Automation Science and Engineering, IEEE Robotics and Automation Magazine – Mike Tao Zhang (Guest Editor); Published in Dec 2006; 3 articles on semiconductor manufacturing • Special Issue on e. Manufacturing in the Semiconductor Industry, IEEE Transactions on Automation Science and Engineering (T-ASE) – Thomas Chen, Mike Tao Zhang, Chen-Fu Chien, John Fowler, and George Shanthikumar (Guest Editors); 37 papers submitted; published in Oct 2007 • Special Issue on Equipment and Operations Automation in the Semiconductor Industry, IEEE Transactions on Automation Science and Engineering (T-ASE) – Chen-Fu Chien, Stephane Dauzere-Peres, Milind Dawande, Han Ding, James Morrison, Jeff Pettinato, Jingang Yi (Guest Editors) – 32 papers submitted and in review; Target publication Oct 2010 IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 11

Conference Involvement • IEEE Conference on Automation Science and Engineering, Shanghai, 2006 – – Conference Involvement • IEEE Conference on Automation Science and Engineering, Shanghai, 2006 – – – • 18 th IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Stresa, Italy, June 11 -12, 2007 – • Dave Gross (Conference Co-Chair). IEEE/SEMI e. Manufacturing Symposium, Taipei, Taiwan, June, 2007 – • Invited Session on Semiconductor Manufacturing: Fan-Tien Cheng, CC Huang, Naiqi Wu, and Mike Tao Zhang (Session Co-Chairs); 14 papers accepted Tech tours to Intel and Semiconductor Manufacturing Int'l Company (SMIC): Mike Tao Zhang (Organizer); 30 people joined Tutorial/Workshop on e. Manufacturing for the Semiconductor Industry: Fan-Tien Cheng, Min. Hsiung Hung, Jonathan Chang, and Mike Tao Zhang (Organizers) Thomas Chen and Mu. Der Jeng (Steering Committee members) IEEE Conference on Automation Science and Engineering (IEEE CASE 2007), Phoenix, USA, Sept 2007 – – Mike Tao Zhang (Program Chair); Intel Fellow Dev Pillai (Keynote Speaker) John Fowler, Chen-Fu Chien, Oliver Rose, and James Wuerfel (Co-Chairs): The 2007 Int’l Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM 2007) – as a part of IEEE CASE 2007 IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 12

Conference Involvement • 4 th IEEE Conference on Automation Science and Engineering, Washington DC, Conference Involvement • 4 th IEEE Conference on Automation Science and Engineering, Washington DC, USA, August 2008. – • 2008 International Symposium on Semiconductor Manufacturing, Tokyo, Japan, Oct. 2008. – • Thomas Chen (Steering Committee member) 4 th Int’l Conference on Modeling and Analysis of Semiconductor Manufacturing, Miami, Florida, USA, Dec. 2008. – • Shi-Chung Chang (Program Committee) Joint symposium of "AEC/APC-Asia 2008" and "e-Manufacturing & DFM Symposium 2008", Hsin. Chu, Taiwan, Nov. 2008. – • Mengchu Zhou (General Chair). Mike Tao Zhang (Steering Committee member) John Fowler and Chen-Fu Chien (Conference Chairs). Mike Tao Zhang (Int’l Advisory Committee member). Joint 20 th Advanced Semiconductor Manufacturing Conference and 2009 International Symposium on Semiconductor Manufacturing, Berlin, Germany, May 2009. – Shi-Chung Chang (Program committee) IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 13

Conference Involvement • 10 th International Conference on Automation Technology (Automation 2009), Tainan (Taiwan), Conference Involvement • 10 th International Conference on Automation Technology (Automation 2009), Tainan (Taiwan), June 2009. – • 5 th IEEE Conference on Automation Science and Engineering, Bangalore, India, Aug 2009 – – – • Mike Tao Zhang, Meng. Chu Zhou (Steering Committee). Tae-Eog Lee (Track Co-Chair), James Morrison (Track Co-Chair). Shi-Chung Chang, Mu. Der Jeng, Wai Kin Victor Chan, Shengwei Ding, Fei Qiao, Naiqi Wu, Jingang Yi (Program Committee). Shi-Chung Chang and Argon Chen, organize special session on Yield Symptom Identification 2009 International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM), Austin, Texas, Dec 2009 – – • Meng-Chu Zhou and Mike Tao Zhang (Int’l Advisory Committee members) Shekar Krishnaswamy, Scott Mason (Conference Organizers) Lars Mönch, Stephane Dauzere-Peres, Oliver Rose (Track Chairs) IEEE International Conference on Robotics and Automation, Anchorage, Alaska, May 2010 – James Morrison (Program Committee) IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 14

Discussion Topic 1 • Professor Shi-Chung Chang, Regional Chair from Taiwan, raised the following Discussion Topic 1 • Professor Shi-Chung Chang, Regional Chair from Taiwan, raised the following comments/questions • Industry focused conferences – In 2009, International Symposium on Semiconductor Manufacturing (ISSM) merged with Advanced Semiconductor Manufacturing Conference (ASMC) – In 2008, we held TC meeting at ISSM – ASMC 2009 was cancelled this year – In 2010, ASMC will be offered prior to Semicon West in hopes of increasing attendance – Consequences of downturn in industry • How can our TC enrich these industry focused events? • How do such events help academics? IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 15

Discussion Topic 1 • For the ASMC/ISSM conferences in 2010+, look to increase the Discussion Topic 1 • For the ASMC/ISSM conferences in 2010+, look to increase the involvement of the TC & academic community – Organize a special academic session(s) – Consider this approach for other such conferences – One issue here is whether the conference proceedings are archived (we will check) • For IEEE CASE 2010, we will look to increase the involvement of the industry – Organize a special industry session – Extended abstracts (2 pages) instead of full papers IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 16

Discussion Topic 2 • Is now the time to expand the scope of TC Discussion Topic 2 • Is now the time to expand the scope of TC to “Semiconductor and Cleantech Manufacturing Automation” • Cleantech: Technologies for clean energy • Examples include solar PV cells, some rechargeable batteries • Manufacturing process is often a simplified version of semiconductor manufacturing • Relationship with Semiconductor Mfg Automation • Many semi professionals have moved to cleantech industries (semi provides a knowledge base) • Semi mfg is complicated! Urgent need to transfer knowledge from semi to cleantech via applied research Productivity increases • Large and growing industry, small presence in RAS • Great growth opportunity for both our TC & cleantech • Likely to be significant source of funding in the future IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 17

Discussion Topic 2 • TC co-chair Mike Zhang has strong connections: Executive VP of Discussion Topic 2 • TC co-chair Mike Zhang has strong connections: Executive VP of the China-US Green Energy Council • Suggested next steps: • Organize a special session at IEEE CASE 2010 on Cleantech mfg automation • Organize a special issue of IEEE TASE on Cleantech mfg automation • TC name and mandate will not officially expand at this time IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 18

IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA IEEE RAS Technical Committee on Semiconductor Manufacturing Automation http: //xs 3 d. kaist. edu/TC-SMA 19